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Hi Emma,</div>
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Our go to method on our DRIE tools is just a relatively high power O2 clean for like 30 min at a kW or 2. Although I was talking to our Oxford technician and he says occasionally it's necessary to mechanically clean these reactors with scotchbright followed
by O2 clean. </div>
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-Michael</div>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Emma Anquillare <eanquillare@gc.cuny.edu><br>
<b>Sent:</b> Monday, March 17, 2025 6:59 PM<br>
<b>To:</b> Labnetwork (labnetwork@mtl.mit.edu) <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] Dry Plasma Etch Cleaning Recipes and Evaluation</font>
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Dear Labnetwork Hivemind,</div>
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I am looking to assemble what we know collectively about dry plasma etch cleaning recipes so that I can summarize, compare, and ultimately experimentally evaluate them. </div>
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I am interested in:</div>
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-Do your facility's etchers (ICP/ RIE) have custom clean recipes specific to certain etch recipes or materials? If so, what are they and what are both the recipe and clean parameters?</div>
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-Do you use an emission spectrometer (or any other method) to develop or evaluate these cleans?</div>
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-How did you come up with these cleans in the first place?</div>
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-Have you seen any good talks, literature, or other resources relevant to this subject?</div>
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Anything you can share is appreciated and (I hope) will be worth your efforts to provide, as I am seeking to compile this for public benefit. </div>
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Thanks!</div>
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Emma</div>
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<b>_____________________________________________</b></div>
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<b>Emma Anquillare, PhD</b></div>
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Research Scientist</div>
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<span style="font-size:12pt">ASRC </span><span style="font-size:16px; background-color:rgb(255,255,255)">Nanofabrication Facility</span></div>
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