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<p class="MsoNormal"><a name="_Hlk109813303"><span style="font-size:11.0pt;mso-ligatures:standardcontextual">On the Plasma-Therm CORIAL Etch platform, especially as these systems are using a shuttle concept (2”, 3”, 4”, 6”, 8” to transfer the wafers or coupons,
using a dedicated shuttle and set of liner/upper injection flange of the process chamber minimizes the time to switch between Fl and Cl processes (estimated 15min for hardware change and plasma clean).<o:p></o:p></span></a></p>
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<p class="MsoNormal"><span style="mso-bookmark:_Hlk109813303"><span style="font-size:11.0pt">David</span></span><span style="mso-bookmark:_Hlk109813303"><span style="font-size:11.0pt;mso-ligatures:standardcontextual"><o:p></o:p></span></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Martin, Michael<br>
<b>Sent:</b> Wednesday, March 19, 2025 4:27 PM<br>
<b>To:</b> Emma Anquillare <eanquillare@gc.cuny.edu>; Labnetwork (labnetwork@mtl.mit.edu) <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> Re: [labnetwork] Dry Plasma Etch Cleaning Recipes and Evaluation<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.0pt;background:#FFEB9C"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#9C6500">CAUTION:</span><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:black"> This email originated
from outside of the organization. Do not click links or open attachments unless you recognize the sender and know the content is safe.<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="color:black">Hi Emma,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"> Our go to method on our DRIE tools is just a relatively high power O2 clean for like 30 min at a kW or 2. Although I was talking to our Oxford technician and he says occasionally it's necessary to mechanically
clean these reactors with scotchbright followed by O2 clean. <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:black">-Michael<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"> <o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black"> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>>
on behalf of Emma Anquillare <<a href="mailto:eanquillare@gc.cuny.edu">eanquillare@gc.cuny.edu</a>><br>
<b>Sent:</b> Monday, March 17, 2025 6:59 PM<br>
<b>To:</b> Labnetwork (<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>) <<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>><br>
<b>Subject:</b> [labnetwork] Dry Plasma Etch Cleaning Recipes and Evaluation</span>
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<p class="xmsonormal" style="line-height:12.0pt;background:#FF4D4D"><b><span style="font-size:10.0pt;color:black">CAUTION:</span></b><span style="font-size:10.0pt;color:black"> This email originated from outside of our organization. Do not click links, open
attachments, or respond unless you recognize the sender's email address and know the contents are safe.</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="color:black">Dear Labnetwork Hivemind,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:black">I am looking to assemble what we know collectively about dry plasma etch cleaning recipes so that I can summarize, compare, and ultimately experimentally evaluate them. <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:black">I am interested in:<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">-Do your facility's etchers (ICP/ RIE) have custom clean recipes specific to certain etch recipes or materials? If so, what are they and what are both the recipe and clean parameters?<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">-Do you use an emission spectrometer (or any other method) to develop or evaluate these cleans?<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">-How did you come up with these cleans in the first place?<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">-Have you seen any good talks, literature, or other resources relevant to this subject?<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Anything you can share is appreciated and (I hope) will be worth your efforts to provide, as I am seeking to compile this for public benefit. <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Thanks!<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Emma<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="color:black">_____________________________________________</span></b><span style="color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="color:black">Emma Anquillare, PhD</span></b><span style="color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Research Scientist<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">ASRC <span style="background:white">
Nanofabrication Facility</span><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black;background:white">City University of New York</span><span style="color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><img border="0" width="337" height="77" style="width:3.5104in;height:.802in" id="x_image_0" src="cid:image001.jpg@01DB9974.E1D350A0"></span><span style="color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><i><span style="color:black">Catalyzing Change, Celebrating Gains: </span></i><span style="color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><i><span style="color:black">A decade of visionary science for the public good.</span></i><span style="color:black"><o:p></o:p></span></p>
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