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<p class="MsoNormal"><span style="font-size:11.0pt">Hi Russ,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">This would need to be sputtered as the vaporization temperatures are too far apart between antimony oxide (300C) and tin oxide (1000C) to yield good results via thermal evaporation. Also, antimony oxide has
a very high vapor pressure and I am sure there would be cross contamination issues down the road if it were sputtered in a general purpose tool.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Rob<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Russ Renzas<br>
<b>Sent:</b> Wednesday, March 19, 2025 5:33 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] antimony-doped tin oxide deposition<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<span style="font-size:9.0pt;font-family:wf_segoe-ui_normal;color:#212121">You don't often get email from
<a href="mailto:rrenzas@unr.edu">rrenzas@unr.edu</a>. <a href="https://aka.ms/LearnAboutSenderIdentification">
Learn why this is important</a> <o:p></o:p></span></p>
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<p class="MsoNormal">I have a user who wants to deposit <span style="font-family:"Calibri",sans-serif;color:black;background:white">
antimony-doped tin oxide. Does anyone have experience with this, is it best evaporated or sputtered, do I need to worry about it contaminating a sputterer?</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:black;background:white">Thanks for any insight,</span><span style="font-family:"Calibri",sans-serif;color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:black;background:white">Russ</span><span style="font-family:"Calibri",sans-serif;color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Russ Renzas<o:p></o:p></p>
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<p class="MsoNormal">University of Nevada, Reno<o:p></o:p></p>
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