<html>
<head>
<meta http-equiv="Content-Type" content="text/html; charset=Windows-1252">
<style type="text/css" style="display:none;"> P {margin-top:0;margin-bottom:0;} </style>
</head>
<body dir="ltr">
<div class="elementToProof" style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
Howdy All,</div>
<div class="elementToProof" style="font-size: 12pt;"><span style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; color: rgb(0, 0, 0);">We are in the process of installing a XeF2 etcher. We understand that
</span><span style="font-family: Aptos, sans-serif, serif, EmojiFont; color: rgb(36, 36, 36);">small quantities of Xe, F2, SiF4, and HF will be present in the exhaust. The issue is whether CPVC or stainless steel should be used for the exhaust lines. Inputs
from anyone who has installed such a system would be greatly appreciated.</span></div>
<div class="elementToProof" style="font-family: Aptos, sans-serif, serif, EmojiFont; font-size: 12pt; color: rgb(36, 36, 36);">
<br>
</div>
<div class="elementToProof" style="font-family: Aptos, sans-serif, serif, EmojiFont; font-size: 12pt; color: rgb(36, 36, 36);">
Thanks!</div>
<div class="elementToProof" style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
<br>
</div>
<div class="elementToProof" style="font-family: "Segoe UI", sans-serif; font-size: 10pt; color: black;">
<b>Sandra G. Malhotra, Ph.D. </b>| Senior Laboratory Manager</div>
<div class="elementToProof" id="Signature">
<p style="text-align: left; text-indent: 0px; background-color: white;"><span style="font-family: "Segoe UI", sans-serif; font-size: 10pt; color: black;"><br>
</span></p>
<p style="text-align: left; text-indent: 0px; background-color: white;"><span style="font-family: "Segoe UI", "Segoe UI Web (West European)", -apple-system, BlinkMacSystemFont, Roboto, "Helvetica Neue", sans-serif; font-size: 10pt; color: rgb(12, 100, 192); background-color: rgb(252, 251, 251);"><i>We
would greatly appreciate an acknowledgement of your work in AggieFab: </i></span><span style="font-family: "Segoe UI", "Segoe UI Web (West European)", -apple-system, BlinkMacSystemFont, Roboto, "Helvetica Neue", sans-serif; font-size: 10pt; color: rgb(12, 100, 192);"><i>“The
nanofabrication was conducted in the Texas A&M University AggieFab Nanofabrication Facility (RRID:SCR_023639), which is supported by the Texas A&M Engineering Experiment Station and Texas A&M University."</i></span></p>
<p style="text-align: left; text-indent: 0px; background-color: white;"><span style="font-family: "Segoe UI", "Segoe UI Web (West European)", -apple-system, BlinkMacSystemFont, Roboto, "Helvetica Neue", sans-serif; font-size: 10pt; color: rgb(12, 100, 192);"><i><br>
</i></span></p>
<p style="text-align: left; text-indent: 0px; background-color: white;"><span style="font-family: "Segoe UI", sans-serif; font-size: 10pt; color: black;">AggieFab Nanofabrication Facility</span></p>
<p style="text-align: left; text-indent: 0px; background-color: white;"><span style="font-family: "Segoe UI", sans-serif; font-size: 10pt; color: blue;"><u><a href="https://aggiefab.tamu.edu/" target="_blank" id="OWA5f03b30c-6106-8c5e-1b2e-d3993ccb1a83" class="OWAAutoLink" title="https://aggiefab.tamu.edu/" rel="noopener noreferrer" data-auth="NotApplicable" data-linkindex="3" style="color: blue; margin: 0px;">https://aggiefab.tamu.edu/</a></u></span></p>
<p style="text-align: left; text-indent: 0px; background-color: white;"><span style="font-family: "Segoe UI", sans-serif; font-size: 10pt; color: black;">Department of Electrical & Computer Engineering, College of Engineering | Texas A&M University</span></p>
<p style="text-align: left; text-indent: 0px; background-color: white;"><span style="font-family: "Segoe UI", sans-serif; font-size: 10pt; color: black;">3253 TAMU | College Station, TX 77843</span></p>
<p style="text-align: left; text-indent: 0px; background-color: white;"><span style="font-family: "Segoe UI", sans-serif; font-size: 10pt; color: black;">ph: 979.845.3199 | </span><span style="font-family: "Segoe UI", sans-serif; font-size: 10pt; color: blue;"><u><a href="mailto:sandra.malhotra@tamu.edu" id="OWA5f6e1872-21c7-6948-e4db-7dace28a89af" class="OWAAutoLink" data-linkindex="4" style="color: blue; margin: 0px;">sandra.malhotra@tamu.edu</a></u></span></p>
<p style="text-align: left; text-indent: 0px; background-color: white;"><span style="font-family: "Segoe UI", sans-serif; font-size: 10pt; color: blue;"><br>
</span></p>
<p style="text-align: left; text-indent: 0px; background-color: white;"><span style="font-family: "Segoe UI", sans-serif; font-size: 10pt; color: black;">- - - - - - - - - - - - - - - - - - - - - - - </span></p>
<p style="text-align: left; text-indent: 0px; background-color: white;"><span style="font-family: "Segoe UI", sans-serif; font-size: 10pt; color: black;"><br>
</span></p>
<p style="text-align: left; text-indent: 0px; background-color: rgb(255, 255, 255);">
<span style="font-family: "Segoe UI", sans-serif; font-size: 10pt; color: rgb(134, 17, 6); background-color: white;"><b>TEXAS A&M UNIVERSITY | FEARLESS on Every Front</b></span></p>
<p style="text-align: left; text-indent: 0px; background-color: rgb(255, 255, 255);">
<span style="font-family: "Segoe UI", "Segoe UI Web (West European)", -apple-system, BlinkMacSystemFont, Roboto, "Helvetica Neue", sans-serif; font-size: 10pt; color: rgb(36, 36, 36);"> </span></p>
<div style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
<br>
</div>
</div>
</body>
</html>