<div dir="ltr"><div dir="ltr"><div dir="ltr">We have 4 150 mm RTP systems with varying levels of materials allowed. One system has 2 different chambers to distinguish between III-V and PZT. <div><br></div><div>III-V or PZT (separate chamber installed upon request) with metals </div><div>III-V no metals</div><div>non-MOS Si, Ce, and SiC, with specified metals allowed</div><div>MOS, 2 chamber system, 1 for activation, 1 for silicides</div></div><div><br></div><div>- Michael</div><div><br></div><div><div dir="ltr" class="gmail_signature"><div dir="ltr"><div>------------------------------------------------------------------------------------------</div><b>Michael Helmbrecht, Ph.D.</b> (he, him, his)<div>Executive Director</div><div>Berkeley Marvell Nanofabrication Laboratory</div><div>520 Sutardja Dai Hall</div><div>Berkeley, CA 94720</div><div>(510) 809-8620</div><div><a href="https://nanolab.berkeley.edu/" target="_blank">https://nanolab.berkeley.edu/</a></div><div>------------------------------------------------------------------------------------------</div></div></div><div><br><div class="gmail_quote gmail_quote_container"><div dir="ltr" class="gmail_attr">On Tue, Apr 1, 2025 at 9:02 AM Philippe Mérel <<a href="mailto:Philippe.Merel@usherbrooke.ca">Philippe.Merel@usherbrooke.ca</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex"><div class="msg-5432443519388117414">




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Hello LabNetwork,</div>
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We are a university cleanroom with all kinds of research projects. We often have to deal with visible residues, smears inside our RTA after work by users.</div>
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I would like to know the rules you implemented on the use of your RTA (allowed materials and so on).</div>
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Thank you.</div>
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<p style="margin-top:0px;margin-bottom:0px"><span style="font-family:Calibri,sans-serif;font-size:14pt;color:rgb(36,36,36)"><b>Philippe Mérel
<i>PhD</i></b></span></p>
<p style="text-align:left;background-color:rgb(255,255,255);margin:0px"><span style="font-family:Calibri,sans-serif;font-size:12pt;color:rgb(36,36,36)">Coordonnateur
</span><span style="font-family:Calibri,sans-serif;font-size:11pt;color:rgb(0,0,0)">Laboratoire de Nanofabrication et de Nanocaractérisation</span><span style="font-family:Calibri,sans-serif;font-size:12pt;color:rgb(36,36,36)"> (LNN)</span></p>
<p style="text-align:left;background-color:rgb(255,255,255);margin:0px"><span style="font-family:Calibri,sans-serif;font-size:12pt;color:rgb(36,36,36)">Institut Interdisciplinaire d’Innovation Technologique – 3iT</span></p>
<p style="text-align:left;background-color:rgb(255,255,255);margin:0px"><span style="font-family:Calibri,sans-serif;font-size:12pt;color:rgb(36,36,36)"><b>Université de Sherbrooke</b></span></p>
<p style="text-align:left;background-color:rgb(255,255,255);margin:0px"><span style="font-family:Calibri,sans-serif;font-size:11pt;color:rgb(36,36,36)">(819) 821-8000 x61941</span></p>
<p style="text-align:left;background-color:rgb(255,255,255);margin:0px"><span style="font-family:Calibri,sans-serif;font-size:11pt;color:rgb(36,36,36)"><br>
<a href="https://www.usherbrooke.ca/3it/" id="m_-5432443519388117414OWA23ef0c0b-9762-6249-5aa6-fde57865c152" title="URL d'origine : https://www.usherbrooke.ca/3it/. Cliquez ou appuyez si vous faites confiance à ce lien." rel="noopener noreferrer" style="margin:0px" target="_blank">https://www.usherbrooke.ca/3it/</a></span></p>
<p style="text-align:left;background-color:rgb(255,255,255);margin:0px"><span style="font-family:Calibri,sans-serif;font-size:11pt;color:rgb(36,36,36)"><img width="198" height="68" style="width: 149.24pt; height: 51.74pt; max-width: 800px; min-width: auto; min-height: auto; margin: 0px;" src="cid:ii_195f2b4e17ba32bd87f1"></span></p>
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</div></blockquote></div></div></div></div><div><br clear="all"></div><div><br></div><span class="gmail_signature_prefix">-- </span><br><div dir="ltr" class="gmail_signature" data-smartmail="gmail_signature"><div dir="ltr"><div>------------------------------------------------------------------------------------------</div><b>Michael Helmbrecht, Ph.D.</b> (he, him, his)<div>Executive Director</div><div>Berkeley Marvell Nanofabrication Laboratory</div><div>520 Sutardja Dai Hall</div><div>Berkeley, CA 94720</div><div>(510) 809-8620</div><div><a href="https://nanolab.berkeley.edu/" target="_blank">https://nanolab.berkeley.edu/</a></div><div>------------------------------------------------------------------------------------------</div></div></div></div>