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<p class="MsoNormal"><span style="font-size:11.0pt;mso-fareast-language:EN-US">When we have “exotic” material requests for anneal (especially wafer diced pieces) that we think may outgas, users are instructed to place an upside down shallow quartz dish over
them. The sample sees the same temperature as is measured from wafer backside, the tool uses a little more power than normal, but if the sample outgasses we only have to clean the dish and not the whole upper quartz chamber window.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-fareast-language:EN-US">Do make sure it is pure quartz though, and do not melt a pyrex beaker like one enterprising user who was in a hurry and could not locate the proper dish. Users of the dishes are
advised of the extra thermal mass and potential burn risk when unloading, so far no issues.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-fareast-language:EN-US">Users who anneal doped samples (implant or diffused) are required to have a 10nm thermal SiO2 or 100nm PECVD SiO2 cap prior to process. So far this seem to capture any upward emission
from heavy doping. <o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-fareast-language:EN-US">Apart from that any dust/debris is removed with an acetone/IPA wipe down, usually the metals tool. We keep a spare window for all chambers in case there is something we cannot remove,
then send the dirty one off for professional wet cleaning or lapping if it is judged to be recoverable.
<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;mso-fareast-language:EN-US">BR, Owain<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Philippe Mérel<br>
<b>Sent:</b> 01 April 2025 13:59<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] How do you manage your RTA systems?<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<span style="font-size:9.0pt;font-family:wf_segoe-ui_normal;color:#212121">You don't often get email from
<a href="mailto:philippe.merel@usherbrooke.ca">philippe.merel@usherbrooke.ca</a>.
<a href="https://aka.ms/LearnAboutSenderIdentification">Learn why this is important</a>
<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:16.5pt;background:#F7F9FA"><strong><span style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:#8D3970">CAUTION:</span></strong><span style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:#8D3970"> This
e-mail originated outside the University of Southampton. <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Hello LabNetwork,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:black">We are a university cleanroom with all kinds of research projects. We often have to deal with visible residues, smears inside our RTA after work by users.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:black">I would like to know the rules you implemented on the use of your RTA (allowed materials and so on).<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Thank you.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<div id="Signature">
<p><b><span style="font-size:14.0pt;font-family:"Calibri",sans-serif;color:#242424">Philippe Mérel
<i>PhD</i></span></b><o:p></o:p></p>
<p style="background:white"><span style="font-family:"Calibri",sans-serif;color:#242424">Coordonnateur
</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">Laboratoire de Nanofabrication et de Nanocaractérisation</span><span style="font-family:"Calibri",sans-serif;color:#242424"> (LNN)</span><o:p></o:p></p>
<p style="background:white"><span style="font-family:"Calibri",sans-serif;color:#242424">Institut Interdisciplinaire d’Innovation Technologique – 3iT</span><o:p></o:p></p>
<p style="background:white"><b><span style="font-family:"Calibri",sans-serif;color:#242424">Université de Sherbrooke</span></b><o:p></o:p></p>
<p style="background:white"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#242424">(819) 821-8000 x61941</span><o:p></o:p></p>
<p style="background:white"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#242424"><br>
<a href="https://www.usherbrooke.ca/3it/" target="_blank" title="URL d'origine : https://www.usherbrooke.ca/3it/. Cliquez ou appuyez si vous faites confiance à ce lien.">https://www.usherbrooke.ca/3it/</a></span><o:p></o:p></p>
<p style="background:white"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#242424"><img border="0" width="198" height="68" style="width:2.0625in;height:.7083in" id="Picture_x0020_1" src="cid:image001.png@01DBA3F2.29C54990"></span><o:p></o:p></p>
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