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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Hi Nathan,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">We have 5% silane diluted in N2. Mixture with N2 is not ideal for a-Si:H deposition. The incorporation of nitrogen will lower the refractive index of a-Si:H.
<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Best,</span><o:p></o:p></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Lucida Calligraphy""><o:p> </o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Lucida Calligraphy"">Lino Eugene, P.Eng., Ph.D.,<o:p></o:p></span></b></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Micro/nanofabrication process engineer<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Quantum-Nano Fabrication and Characterization Facility<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Office of Research<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">QNC 1611<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif">University of Waterloo<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif">200 University Avenue West<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif">Waterloo, ON, Canada <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif">N2L 3G1</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif">Ph: +1 519-888-4567 #37788<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Cell: +1 226-929-1685</span><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif">Websites:<o:p></o:p></span></p>
<p class="MsoNormal"><a href="https://uwaterloo.ca/quantum-nano-fabrication-and-characterization-facility/"><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:#0563C1">https://uwaterloo.ca/quantum-nano-fabrication-and-characterization-facility/</span></a><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><a href="https://fab.qnc.uwaterloo.ca/"><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:#0563C1">https://fab.qnc.uwaterloo.ca/</span></a><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span lang="FR-CA" style="font-size:11.0pt">De :</span></b><span lang="FR-CA" style="font-size:11.0pt"> labnetwork <labnetwork-bounces@mtl.mit.edu> de la part de Nathan Aultman <naultman@creol.ucf.edu><br>
<b>Envoyé :</b> lundi, avril 7, 2025 11:47:17 a.m.<br>
<b>À :</b> labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Objet :</b> [labnetwork] PECVD dilute gas question(s)<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="FR-CA"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:Aptos">Hello Labnetwork,</span><span style="font-family:Aptos"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:Aptos"> </span><span style="font-family:Aptos"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:Aptos">We have a PECVD system using dilute silane (2%)/N2. Some labs with similar systems use dilute silane (5%)/helium. We are nearing the end of our current cylinder and will need a replacement
soon. What are the advantages and disadvantages when choosing the dilute gas? Does choosing a helium mixture produce more desirable films and/or quality? In other words, is it worth it to purchase a cylinder with helium? Also, what would be the reason(s)
for using helium as an additional process gas? E.g., a separate MFC and gas line.</span><span style="font-family:Aptos"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:Aptos"> </span><span style="font-family:Aptos"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:Aptos">Thank you all in advance.</span><span style="font-family:Aptos"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:Aptos"> </span><span style="font-family:Aptos"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Nathan C. Aultman</span><span style="font-family:Aptos"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">University of Central Florida</span><span style="font-family:Aptos"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">407-823-6852</span><span style="font-family:Aptos"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#0563C1"><a href="mailto:naultman@creol.ucf.edu"><span style="color:#0563C1">naultman@creol.ucf.edu</span></a></span><span style="font-family:Aptos"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:Aptos"> <o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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