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<p class="MsoNormal"><span style="font-size:11.0pt">Most Excellent Lab Network,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Some concerns have been recently raised about using our He leak checker on our chlorine etch systems, with the view that we could end up pulling residual chlorine into it and then eventually damaging the expensive
test tool. Any advice from the collective wisdom on the risks of doing that and any mitigation strategies to suggest? One thought was to install some form of chlorine adsorber in the line, but that will impact the ability of the helium to reach the checker.
Thanks.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Dan<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Daniel Woodie<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Director, Micro/Nano Fabrication Center, Princeton Materials Institute<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Princeton University<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">155 Andlinger Center<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">86 Olden St<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Princeton, NJ 08540<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">(609)258-5922 (office)<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">(607)227-2993 (cell)<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><a href="mailto:daniel.woodie@princeton.edu">daniel.woodie@princeton.edu</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><a href="https://mnfc.princeton.edu/">mnfc.princeton.edu</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><a href="http://www.linkedin.com/in/danielpwoodie/">www.linkedin.com/in/danielpwoodie</a><o:p></o:p></span></p>
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