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It sounds like there might be extra cooling occurring when higher power is needed for evaporation. This could overheat the ebeam assembly, including the two magnet plates on the sides, leading to an offset of the sweep center. Just a thought.</div>
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Bangzhi</div>
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Penn State Nanofab</div>
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<div dir="ltr" id="x_divRplyFwdMsg"><span style="font-family: Calibri, sans-serif; font-size: 11pt; color: rgb(0, 0, 0);"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Rob Belan <robb@lesker.com><br>
<b>Sent:</b> Wednesday, April 16, 2025 5:02:25 AM<br>
<b>To:</b> Chris Cott <Chris.Cott@nanomelbourne.com><br>
<b>Cc:</b> labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> Re: [labnetwork] Glow around metals during ebeam evaporation</span>
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<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"><span style="font-size: 11pt;">Hi Chris,</span></p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"><span style="font-size: 11pt;"> </span></p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"><span style="font-size: 11pt;">I would sand the copper cover as well. If insulating material covers the copper parts of the e-gun charging can happen. But the liners you are using should
be good. Check the ground for the system. You need to have a good ground – that is important. Make sure you are not oxidizing your materials with quick vents after deposition. If you use spacers under the crucible liners it takes time for the material
in the liner to cool down.</span></p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"><span style="font-size: 11pt;"> </span></p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"><span style="font-size: 11pt;">Take care.</span></p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"><span style="font-size: 11pt;"> </span></p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"><span style="font-size: 11pt;">Rob</span></p>
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<span style="font-family: Arial; font-size: 16px; font-weight: 700;">Rob Belan</span><span style="font-family: remialcxesans; font-size: 1px; color: rgb(255, 255, 255); line-height: 1px; font-weight: 700;"></span><span style="font-family: template-AnJ-S1l8EeqpTAANOhMLNA; font-size: 1px; color: rgb(255, 255, 255); line-height: 1px; font-weight: 700;"></span><span style="font-family: zone-1; font-size: 1px; color: rgb(255, 255, 255); line-height: 1px; font-weight: 700;"></span><span style="font-family: zones-AQ; font-size: 1px; color: rgb(255, 255, 255); line-height: 1px; font-weight: 700;"></span></p>
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<span style="font-family: Arial; font-size: 13px; font-weight: 700;">Technical Director PVD Products</span></p>
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<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"><span style="font-family: Calibri, sans-serif; font-size: 11pt;"><b>From:</b> Chris Cott <Chris.Cott@nanomelbourne.com><br>
<b>Sent:</b> Tuesday, April 15, 2025 8:13 PM<br>
<b>To:</b> Rob Belan <robb@lesker.com><br>
<b>Cc:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Glow around metals during ebeam evaporation</span></p>
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<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;">Hi Rob,</p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"> </p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;">Thanks for the reply!</p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"> </p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;">We suspected charging but couldn't figure out the cause. We use a Mo crucible liner for the Ag and a graphite one for the Cu. Is it possible that, because the materials don't wet to the
crucibles, there is poor conductivity between the material and the crucible? As a first step I'll try sanding the pockets to make sure the crucible liners and pockets have good contact.</p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"> </p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;">Warm regards,</p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;">Chris.</p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"> </p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"><span style="font-family: Cambria, serif; font-size: 9pt; color: black;">-------------------------------------------------------------------------------------------<br>
Chris Cott <i>BAppSc, BSc, PhD.</i></span></p>
<p style="margin: 0in;"><span style="font-family: Cambria, serif; font-size: 9pt; color: black;">Process Engineer,</span></p>
<p style="margin: 0in;"><span style="font-family: Cambria, serif; font-size: 9pt; color: black;">Melbourne Centre for Nanofabrication</span></p>
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<p style="margin: 0in;"><span style="font-family: Cambria, serif; font-size: 9pt; color: black;">Victorian Node of the Australian National Fabrication Facility</span></p>
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<p style="margin: 0in;"><span style="font-family: Cambria, serif; font-size: 9pt; color: black;">E:
</span><span style="font-family: Cambria, serif; font-size: 9pt; color: blue;"><u><a href="mailto:chris.cott@nanomelbourne.com" id="OWA685a17b0-32b2-c0be-b1db-a5a8298f0de5" class="OWAAutoLink" style="color: blue; margin-top: 0px; margin-bottom: 0px;"> chris.cott@nanomelbourne.com</a></u></span></p>
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<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"> </p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"> </p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;">On Tue, 15 Apr 2025 at 23:20, Rob Belan <<span style="color: blue;"><u><a href="mailto:robb@lesker.com" id="OWAd19d62ce-372f-a14c-d846-5ef762baa376" class="OWAAutoLink" style="color: blue; margin-top: 0px; margin-bottom: 0px;">robb@lesker.com</a></u></span>>
wrote:</p>
<blockquote style="margin-right: 0in; margin-left: 4.8pt; padding: 0in 0in 0in 6pt; border-left: 1pt solid rgb(204, 204, 204);">
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"><span style="font-size: 11pt;">Hi Chris,</span></p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"><span style="font-size: 11pt;"> </span></p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"><span style="font-size: 11pt;">What kind of crucible liner are you using for the metals? It sounds like you are using an insulating crucible liner like Al2O3? If so, you are not allowing
the electrons to ground out. This can then cause charging effects that you may be seeing. Try switching to an electrically conductive crucible liner and this problem should go away for the metals.</span></p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"><span style="font-size: 11pt;"> </span></p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"><span style="font-size: 11pt;">Take care.</span></p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"><span style="font-size: 11pt;"> </span></p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"><span style="font-size: 11pt;">Rob</span></p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"><span style="font-size: 11pt;"> </span></p>
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<p style="margin: 0in;"><span style="font-family: Arial, sans-serif; color: rgb(31, 73, 125);"><b>Rob Belan</b></span><span style="font-family: remialcxesans; font-size: 1pt; color: white;"><b></b></span><span style="font-family: template-AnJ-S1l8EeqpTAANOhMLNA; font-size: 1pt; color: white;"><b></b></span><span style="font-family: zone-1; font-size: 1pt; color: white;"><b></b></span><span style="font-family: zones-AQ; font-size: 1pt; color: white;"><b></b></span></p>
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<p style="margin: 0in;"><span style="font-family: Arial, sans-serif; font-size: 10pt; color: rgb(31, 73, 125);"><b>Technical Director PVD Products</b></span></p>
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<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"><span style="font-family: Calibri, sans-serif; font-size: 11pt;"><b>From:</b> labnetwork <</span><span style="font-family: Calibri, sans-serif; font-size: 11pt; color: blue;"><u><a href="mailto:labnetwork-bounces@mtl.mit.edu" id="OWA29c583d1-8f7e-4e90-4f87-678a4bc10c44" class="OWAAutoLink" style="color: blue; margin-top: 0px; margin-bottom: 0px;">labnetwork-bounces@mtl.mit.edu</a></u></span><span style="font-family: Calibri, sans-serif; font-size: 11pt;">>
<b>On Behalf Of </b>Chris Cott<br>
<b>Sent:</b> Tuesday, April 15, 2025 3:01 AM<br>
<b>To:</b> </span><span style="font-family: Calibri, sans-serif; font-size: 11pt; color: blue;"><u><a href="mailto:labnetwork@mtl.mit.edu" id="OWA397ebdfc-b53e-016e-5051-e9a32fe34727" class="OWAAutoLink" style="color: blue; margin-top: 0px; margin-bottom: 0px;">labnetwork@mtl.mit.edu</a></u></span><span style="font-family: Calibri, sans-serif; font-size: 11pt;"><br>
<b>Subject:</b> [labnetwork] Glow around metals during ebeam evaporation</span></p>
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<span style="letter-spacing: revert; font-family: wf_segoe-ui_normal; font-size: 9pt; color: rgb(33, 33, 33);">You don't often get email from
</span><span style="letter-spacing: revert; font-family: wf_segoe-ui_normal; font-size: 9pt; color: blue;"><u><a href="mailto:chris.cott@nanomelbourne.com" id="OWA44c64d43-a2a9-1dbb-ead6-e14a1320ff51" class="OWAAutoLink" style="color: blue; margin-top: 0px; margin-bottom: 0px;">chris.cott@nanomelbourne.com</a></u></span><span style="letter-spacing: revert; font-family: wf_segoe-ui_normal; font-size: 9pt; color: rgb(33, 33, 33);">.
</span><span style="letter-spacing: revert; font-family: wf_segoe-ui_normal; font-size: 9pt; color: blue;"><u><a href="https://aka.ms/LearnAboutSenderIdentification" id="OWA2a71408b-13a8-485c-affb-0bb46504b560" class="OWAAutoLink" data-auth="NotApplicable" style="color: blue; margin-top: 0px; margin-bottom: 0px;">Learn
why this is important</a></u></span></p>
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<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;">Hi all,</p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"> </p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;">We have been noticing an intermittent issue in two of our ebeam evaporators.</p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"> </p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;">The symptoms are:</p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;">- A blue/green glow around the area the beam contacts the material</p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;">- Higher than usual power requirements to evaporate</p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;">- Partial deflection of the beam (e.g., a sweep pattern that is usually contained within the crucible starts to contact the edges)</p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"> </p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;">This happens only sometimes and only with certain materials, including Ag and Cu.</p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"> </p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;">Is anyone familiar with this and its cause? Is the glow plasma or Bremsstrahlung from electrons being deflected? Can anyone point us in the right direction towards a solution to the issue?</p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"> </p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;">Thanks in advance!</p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;">Chris</p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"> </p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"><span style="font-family: Cambria, serif; font-size: 9pt; color: black;">-------------------------------------------------------------------------------------------<br>
Chris Cott <i>BAppSc, BSc, PhD.</i></span></p>
<p style="margin: 0in;"><span style="font-family: Cambria, serif; font-size: 9pt; color: black;">Process Engineer,</span></p>
<p style="margin: 0in;"><span style="font-family: Cambria, serif; font-size: 9pt; color: black;">Melbourne Centre for Nanofabrication</span></p>
<p style="margin: 0in;"><span style="font-family: Cambria, serif; font-size: 9pt; color: black;">151 Wellington Road, Clayton 3168</span></p>
<p style="margin: 0in;"><span style="font-family: Cambria, serif; font-size: 9pt; color: black;">Victorian Node of the Australian National Fabrication Facility</span></p>
<p style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;"><span style="font-family: Cambria, serif; font-size: 9pt; color: black;">Ph:
</span><span style="color: black;">+61 (3) 9905 1562</span></p>
<p style="margin: 0in;"><span style="font-family: Cambria, serif; font-size: 9pt; color: black;">W:
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<p style="margin: 0in;"><span style="font-family: Cambria, serif; font-size: 9pt; color: black;">W:
</span><span style="font-family: Cambria, serif; font-size: 9pt; color: blue;"><u><a href="https://linkprotect.cudasvc.com/url?a=http%3a%2f%2fanff.org.au%2f&c=E,1,kIzbVf3bV30uplPx56TprULB9eYL_5EoKKWsZazng2i-pVpEPgSCxcCyZGjpGkSghAHvFnBxKMzTrAUaCiIL0M7sRA1GDNb_V5SpApzYYrAigw,,&typo=1" id="OWAbfef85b1-690a-5382-031f-7fa522fe4405" class="OWAAutoLink" originalsrc="https://linkprotect.cudasvc.com/url?a=http%3a%2f%2fanff.org.au%2f&c=E,1,kIzbVf3bV30uplPx56TprULB9eYL_5EoKKWsZazng2i-pVpEPgSCxcCyZGjpGkSghAHvFnBxKMzTrAUaCiIL0M7sRA1GDNb_V5SpApzYYrAigw,,&typo=1" data-auth="NotApplicable" style="color: blue; margin-top: 0px; margin-bottom: 0px;">http://www.anff.org.au</a></u></span></p>
<p style="margin: 0in;"><span style="font-family: Cambria, serif; font-size: 9pt; color: black;">E:
</span><span style="font-family: Cambria, serif; font-size: 9pt; color: blue;"><u><a href="mailto:chris.cott@nanomelbourne.com" id="OWAf7706f6c-ca49-6923-eed6-ff443e77dda6" class="OWAAutoLink" style="color: blue; margin-top: 0px; margin-bottom: 0px;"> chris.cott@nanomelbourne.com</a></u></span></p>
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