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<p class="MsoNormal"><span style="font-size:11.0pt">Hi Chris,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">I would sand the copper cover as well. If insulating material covers the copper parts of the e-gun charging can happen. But the liners you are using should be good. Check the ground for the system. You
need to have a good ground – that is important. Make sure you are not oxidizing your materials with quick vents after deposition. If you use spacers under the crucible liners it takes time for the material in the liner to cool down.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Take care.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Rob<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> Chris Cott <Chris.Cott@nanomelbourne.com>
<br>
<b>Sent:</b> Tuesday, April 15, 2025 8:13 PM<br>
<b>To:</b> Rob Belan <robb@lesker.com><br>
<b>Cc:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Glow around metals during ebeam evaporation<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<span style="font-size:9.0pt;font-family:wf_segoe-ui_normal;color:#212121">You don't often get email from
<a href="mailto:chris.cott@nanomelbourne.com">chris.cott@nanomelbourne.com</a>. <a href="https://aka.ms/LearnAboutSenderIdentification">
Learn why this is important</a> <o:p></o:p></span></p>
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<p class="MsoNormal">Hi Rob,<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Thanks for the reply!<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">We suspected charging but couldn't figure out the cause. We use a Mo crucible liner for the Ag and a graphite one for the Cu. Is it possible that, because the materials don't wet to the crucibles, there is poor conductivity between the
material and the crucible? As a first step I'll try sanding the pockets to make sure the crucible liners and pockets have good contact.<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Warm regards,<o:p></o:p></p>
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<p class="MsoNormal">Chris.<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Cambria",serif;color:black">-------------------------------------------------------------------------------------------<br>
Chris Cott <i>BAppSc, BSc, PhD.</i></span> <o:p></o:p></p>
<p style="margin:0in"><span style="font-size:9.0pt;font-family:"Cambria",serif;color:black">Process Engineer,</span><o:p></o:p></p>
<p style="margin:0in"><span style="font-size:9.0pt;font-family:"Cambria",serif;color:black">Melbourne Centre for Nanofabrication</span><o:p></o:p></p>
<p style="margin:0in"><span style="font-size:9.0pt;font-family:"Cambria",serif;color:black">151 Wellington Road, Clayton 3168</span><o:p></o:p></p>
<p style="margin:0in"><span style="font-size:9.0pt;font-family:"Cambria",serif;color:black">Victorian Node of the Australian National Fabrication Facility</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Cambria",serif;color:black">Ph: </span><span style="color:black">+61 (3) 9905 1562</span>
<o:p></o:p></p>
<p style="margin:0in"><span style="font-size:9.0pt;font-family:"Cambria",serif;color:black">W: <a href="https://linkprotect.cudasvc.com/url?a=http%3a%2f%2fnanomelbourne.com%2f&c=E,1,rqzgaVBOD2qffiVSD4M9kA4LAmIN1xgDua436Pz9WV7vu_Fj88Ebrully0KNADcHgkRTAX8MSQXz1HWXJMT3gg-d9aSeX1HRNlQaes2uROJhOfGh_6ff2fNYL3A,&typo=1" target="_blank">http://nanomelbourne.com</a></span><o:p></o:p></p>
<p style="margin:0in"><span style="font-size:9.0pt;font-family:"Cambria",serif;color:black">W: <a href="https://linkprotect.cudasvc.com/url?a=http%3a%2f%2fanff.org.au%2f&c=E,1,IA0wz8CPrMZu-TfV0kT2i7ev3jepsqHBs9mBmS4U45yo9QYh_UIkdHWmTU_peCsw6vIMXgaTldgJPKwFrd6AB5XmehDYD7dPqQ3BtEuMEGQ,&typo=1" target="_blank">http://www.anff.org.au</a></span><o:p></o:p></p>
<p style="margin:0in"><span style="font-size:9.0pt;font-family:"Cambria",serif;color:black">E: <a href="mailto:chris.cott@nanomelbourne.com" target="_blank"> chris.cott@nanomelbourne.com</a></span><o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">On Tue, 15 Apr 2025 at 23:20, Rob Belan <<a href="mailto:robb@lesker.com" target="_blank">robb@lesker.com</a>> wrote:<o:p></o:p></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="font-size:11.0pt">Hi Chris,</span><o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="font-size:11.0pt"> </span><o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="font-size:11.0pt">What kind of crucible liner are you using for the metals? It sounds like you are using an insulating crucible liner like Al2O3? If so, you are not
allowing the electrons to ground out. This can then cause charging effects that you may be seeing. Try switching to an electrically conductive crucible liner and this problem should go away for the metals.</span><o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="font-size:11.0pt"> </span><o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="font-size:11.0pt">Take care.</span><o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="font-size:11.0pt"> </span><o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="font-size:11.0pt">Rob</span><o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="font-size:11.0pt"> </span><o:p></o:p></p>
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<p style="margin:0in"><b><span style="font-family:"Arial",sans-serif;color:#1F497D">Rob Belan</span></b><b><span style="font-size:1.0pt;font-family:remialcxesans;color:white"></span></b><b><span style="font-size:1.0pt;font-family:template-AnJ-S1l8EeqpTAANOhMLNA;color:white"></span></b><b><span style="font-size:1.0pt;font-family:zone-1;color:white"></span></b><b><span style="font-size:1.0pt;font-family:zones-AQ;color:white"></span></b><b><span style="font-family:"Arial",sans-serif;color:#1F497D"><o:p></o:p></span></b></p>
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<p style="margin:0in"><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D">Technical Director PVD Products<o:p></o:p></span></b></p>
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<p style="margin:0in"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:#1F497D">Tel: <a href="tel:+1%20(412)%20387-9200%20x7378" target="_blank"><span style="color:#1F497D;text-decoration:none">+1 (412) 387-9200 x7378</span></a><o:p></o:p></span></p>
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<p style="margin:0in"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:#1F497D">| Cell: <a href="tel:+1%20(412)%20398-1275" target="_blank"><span style="color:#1F497D;text-decoration:none">+1 (412) 398-1275</span></a><o:p></o:p></span></p>
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<p style="margin:0in"><i><span style="font-size:7.0pt;font-family:"Arial",sans-serif;color:#000001">If this email is transmitted to you in error, please notify me, and then delete this email and all copies. If this email is sent for legal or business purposes,
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this information is limited to the purpose(s) expressly stated in, or reasonably implied by, this email. Any questions should be directed to me. Thank you.<o:p></o:p></span></i></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Chris Cott<br>
<b>Sent:</b> Tuesday, April 15, 2025 3:01 AM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Glow around metals during ebeam evaporation</span><o:p></o:p></p>
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<span style="font-size:9.0pt;font-family:wf_segoe-ui_normal;color:#212121">You don't often get email from
<a href="mailto:chris.cott@nanomelbourne.com" target="_blank">chris.cott@nanomelbourne.com</a>.
<a href="https://aka.ms/LearnAboutSenderIdentification" target="_blank">Learn why this is important</a>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Hi all,<o:p></o:p></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">We have been noticing an intermittent issue in two of our ebeam evaporators.<o:p></o:p></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <o:p></o:p></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">The symptoms are:<o:p></o:p></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">- A blue/green glow around the area the beam contacts the material<o:p></o:p></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">- Higher than usual power requirements to evaporate<o:p></o:p></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">- Partial deflection of the beam (e.g., a sweep pattern that is usually contained within the crucible starts to contact the edges)<o:p></o:p></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <o:p></o:p></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">This happens only sometimes and only with certain materials, including Ag and Cu.<o:p></o:p></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <o:p></o:p></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Is anyone familiar with this and its cause? Is the glow plasma or Bremsstrahlung from electrons being deflected? Can anyone point us in the right direction towards a solution to
the issue?<o:p></o:p></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <o:p></o:p></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Thanks in advance!<o:p></o:p></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Chris<o:p></o:p></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <o:p></o:p></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="font-size:9.0pt;font-family:"Cambria",serif;color:black">-------------------------------------------------------------------------------------------<br>
Chris Cott <i>BAppSc, BSc, PhD.</i></span> <o:p></o:p></p>
<p style="margin:0in"><span style="font-size:9.0pt;font-family:"Cambria",serif;color:black">Process Engineer,</span><o:p></o:p></p>
<p style="margin:0in"><span style="font-size:9.0pt;font-family:"Cambria",serif;color:black">Melbourne Centre for Nanofabrication</span><o:p></o:p></p>
<p style="margin:0in"><span style="font-size:9.0pt;font-family:"Cambria",serif;color:black">151 Wellington Road, Clayton 3168</span><o:p></o:p></p>
<p style="margin:0in"><span style="font-size:9.0pt;font-family:"Cambria",serif;color:black">Victorian Node of the Australian National Fabrication Facility</span><o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="font-size:9.0pt;font-family:"Cambria",serif;color:black">Ph: </span><span style="color:black">+61 (3) 9905 1562</span>
<o:p></o:p></p>
<p style="margin:0in"><span style="font-size:9.0pt;font-family:"Cambria",serif;color:black">W: <a href="https://linkprotect.cudasvc.com/url?a=http%3a%2f%2fnanomelbourne.com%2f&c=E,1,OkpNVSWyFbOG6YjCiRY9KkDPzTg6_wNxvg3OSxRtvIqMYewpDghQrTKF-iBbogHij40arrUo80Sk6sxV37SvkXB9z-eN_mmhDaUPWHwZ692jPsvIftijic2m&typo=1" target="_blank">http://nanomelbourne.com</a></span><o:p></o:p></p>
<p style="margin:0in"><span style="font-size:9.0pt;font-family:"Cambria",serif;color:black">W: <a href="https://linkprotect.cudasvc.com/url?a=http%3a%2f%2fanff.org.au%2f&c=E,1,kIzbVf3bV30uplPx56TprULB9eYL_5EoKKWsZazng2i-pVpEPgSCxcCyZGjpGkSghAHvFnBxKMzTrAUaCiIL0M7sRA1GDNb_V5SpApzYYrAigw,,&typo=1" target="_blank">http://www.anff.org.au</a></span><o:p></o:p></p>
<p style="margin:0in"><span style="font-size:9.0pt;font-family:"Cambria",serif;color:black">E: <a href="mailto:chris.cott@nanomelbourne.com" target="_blank"> chris.cott@nanomelbourne.com</a></span><o:p></o:p></p>
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