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<div class="elementToProof" style="font-family: "Calibri Light", "Helvetica Light", sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
Hi Justin,</div>
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<br>
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Raith has its own line of laser writer: <a href="https://raith.com/products/laser-lithography/" id="LPlnk">
https://raith.com/products/laser-lithography/</a></div>
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Though I have never worked with the tool, so cannot say anything about the performance or reliability of the Raith laser system.</div>
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Personally, I would choose the Heidelberg MLA150 maskless aligner if money is not an issue. The software interface of MLA150 is really user friendly.</div>
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Best,</div>
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Yong Sun</div>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Michelakis, Kostis <kostis@slac.stanford.edu><br>
<b>Sent:</b> Friday, April 18, 2025 11:34 AM<br>
<b>To:</b> Moreau, Justin L <Justin_Moreau@uml.edu>; labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> Re: [labnetwork] Heidelberg uMLA direct write system</font>
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<div><font size="4" face="Times New Roman">Hi Justin,<br>
<br>
Have a look at Durham Magneto Optics. I never had one of their tools but they have good reviews here in Labnetwork.<br>
<br>
Kostis<br>
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<p style="margin:0in"><b><span style="font-size:9.0pt; font-family:"Arial",sans-serif; color:black">Kostis Michelakis, PhD</span></b></p>
<p class="x_MsoNormal" style="margin-bottom:0in"><span style="font-size:9.0pt; line-height:115%; font-family:"Arial",sans-serif; color:black">DMF Lab Manager</span></p>
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<p class="x_MsoNormal" style="margin-bottom:0in"><b><span style="font-size:9.0pt; line-height:115%; font-family:"Arial",sans-serif; color:#861106">SLAC National Accelerator Laboratory </span></b><span style="font-size:9.0pt; line-height:115%; font-family:"Arial",sans-serif; color:#861106"></span></p>
<p class="x_MsoNormal"><span style="font-size:9.0pt; line-height:115%; font-family:"Arial",sans-serif; color:#861106"><a href="http://slac.stanford.edu/" originalsrc="http://slac.stanford.edu/" title="slac.stanford.edu"><span style="color:#861106">slac.stanford.edu</span></a></span></p>
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<div class="x_moz-cite-prefix">On 4/17/2025 3:14 PM, Moreau, Justin L wrote:<br>
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<p class="x_MsoNormal"><span style="font-size:11.0pt"> </span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt">Labnetwork Community,</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt"> </span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt">We are looking at replacing our Heidelberg uP101 direct/mask write system.
</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt">We currently have a quote for a uMLA configured for 0.6um min feature, 150mm stage, optical focus and LED:365</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt"> </span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt">Do you have a similar build? I welcome your feedback.</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt">Do you know of any other direct write manufacturer whose quality and reliability are comparable to Heidelberg?</span></p>
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<p class="x_MsoNormal"><span style="font-size:11.0pt"> </span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt">Thanks so much!</span></p>
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<p class="x_MsoNormal"><span style="font-size:10.5pt; font-family:"Helvetica",sans-serif; color:black"><a href="https://www.linkedin.com/company/umass-lowell-core-research-facilities/" originalsrc="https://www.linkedin.com/company/umass-lowell-core-research-facilities/"><span style="color:blue"></span></a><img border="0" width="70" height="60" id="x_Picture_x0020_1" alt="University of Massachusetts Lowell" class="" style="width:.7291in; height:.625in" data-outlook-trace="F:1|T:1" src="cid:part1.PLSG2x0X.JlhXmTUO@slac.stanford.edu"><span style=""></span></span></p>
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<p class="x_MsoNormal"><b><span style="font-size:10.5pt; font-family:"Helvetica",sans-serif; color:black">Justin Moreau</span></b></p>
<p class="x_MsoNormal"><i><span style="font-size:10.5pt; font-family:"Times New Roman",serif; color:black">Director, Nanofabrication Core</span></i></p>
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<p class="x_MsoNormal" align="right" style="text-align:right"><span style="font-size:10.5pt; font-family:"Times New Roman",serif; color:black; text-transform:uppercase">CORE RESEARCH FACILITIES</span></p>
<p class="x_MsoNormal" align="right" style="text-align:right"><span style="font-size:10.5pt; font-family:"Times New Roman",serif; color:black">ETIC</span></p>
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<p class="x_MsoNormal" style="line-height:18.0pt"><b><span style="font-size:9.0pt; font-family:"Helvetica",sans-serif; color:black">E:</span></b><span style="font-size:9.0pt; font-family:"Helvetica",sans-serif; color:black"> <a href="mailto:Justin_Moreau@uml.edu"><span style="color:black; text-decoration:none">Justin_Moreau@uml.edu</span></a>
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<p class="x_MsoNormal" style="line-height:18.0pt"><b><span style="font-size:9.0pt; font-family:"Helvetica",sans-serif; color:black">T:</span></b><span style="font-size:9.0pt; font-family:"Helvetica",sans-serif; color:black"> 978-934-3615 <b>M:
</b>978-337-8148</span></p>
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<p class="x_MsoNormal"><a href="https://www.linkedin.com/company/umass-lowell-core-research-facilities/" originalsrc="https://www.linkedin.com/company/umass-lowell-core-research-facilities/"><span style="font-size:11.0pt; color:windowtext; text-decoration:none"><img border="0" width="114" height="45" id="x_Picture_x0020_2" class="" style="width:1.1875in; height:.4722in" data-outlook-trace="F:1|T:1" src="cid:part2.LoVHsjSA.uLHVxVNA@slac.stanford.edu"></span></a><span style="font-size:11.0pt">
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