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</o:shapelayout></xml><![endif]--></head><body lang=EN-US link="#0563C1" vlink="#954F72" style='word-wrap:break-word'><div class=WordSection1><p class=MsoNormal style='margin-top:6.0pt'>Hello Lab Network-<o:p></o:p></p><p class=MsoNormal style='margin-top:6.0pt'>We need to get our hands on the SECS/GEM communications information for the following two SAMCO reactive ion etcher models.<o:p></o:p></p><ol style='margin-top:0in' start=1 type=1><li class=MsoListParagraph style='margin-top:6.0pt;margin-left:0in;mso-list:l0 level1 lfo1'>Samco RIE-202-iPC <o:p></o:p></li><li class=MsoListParagraph style='margin-top:6.0pt;margin-left:0in;mso-list:l0 level1 lfo1'>Samco RIE-200-iPC <o:p></o:p></li></ol><p class=MsoNormal style='margin-top:6.0pt'>We’ve requested the SECS/GEM manuals directly from Samco with no response. If one of you has coms configuration information for these models, that would be helpful information. Thanks for your time.<o:p></o:p></p><p class=MsoNormal style='margin-top:6.0pt'>Regards,<o:p></o:p></p><p class=MsoNormal style='margin-top:6.0pt'>-<b>Carrie</b><o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><b><span style='font-size:9.0pt;font-family:"Book Antiqua",serif'>S. Carolene Huguenin<o:p></o:p></span></b></p><p class=MsoNormal><span style='font-size:9.0pt;font-family:"Book Antiqua",serif'>Associate Group Leader<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:9.0pt;font-family:"Book Antiqua",serif'>Microelectronics Laboratory<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:9.0pt;font-family:"Book Antiqua",serif'>ML 201-B<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:9.0pt;font-family:"Book Antiqua",serif'>(o): (781) 981-1643<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:9.0pt;font-family:"Book Antiqua",serif'>(m): (781) 238-0317<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:10.0pt;font-family:"Arial Narrow",sans-serif'><img width=113 height=47 style='width:1.177in;height:.4895in' id="Picture_x0020_1" src="cid:image001.gif@01DBC32D.AB227B70" alt=MITLLSmaller><br></span><span style='font-size:9.0pt;font-family:"Book Antiqua",serif'>244 Wood Street<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:9.0pt;font-family:"Book Antiqua",serif'>Lexington, MA 02420<o:p></o:p></span></p><p class=MsoNormal><o:p> </o:p></p></div></body></html>