<div dir="ltr"><div dir="ltr">Hi Chris,<div><br></div><div>Entegris has 200 mm Wafer SMIF pods that can take 150 mm wafer cassettes made by them.<div><br></div><div><span class="gmail_signature_prefix">--</span><br><div dir="ltr" class="gmail_signature"><div dir="ltr"><div>------------------------------------------------------------------------------------------</div><b>Michael Helmbrecht, Ph.D.</b> (he, him, his)<div>Executive Director</div><div>Berkeley Marvell Nanofabrication Laboratory</div><div>520 Sutardja Dai Hall</div><div>Berkeley, CA 94720</div><div>(510) 809-8620</div><div><a href="https://nanolab.berkeley.edu/" target="_blank">https://nanolab.berkeley.edu/</a></div><div>------------------------------------------------------------------------------------------</div></div></div></div></div></div><br><div class="gmail_quote gmail_quote_container"><div dir="ltr" class="gmail_attr">On Tue, May 20, 2025 at 5:00 PM Massey, Travis <<a href="mailto:massey21@llnl.gov">massey21@llnl.gov</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex"><div class="msg-2461179441028457318">
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<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif">Hi Chris,<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif"><u></u> <u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif">Good to hear! LLNL picked up one of these Accu-Seal systems within the last year. It’s basically a heat-sealed bagging system with options for either vacuum or inert gas
fill (N2, Ar, your choice).<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif"><a href="https://accu-seal.com/model-675-smartvac2-bag-sealer-impulse-heat/" target="_blank">https://accu-seal.com/model-675-smartvac2-bag-sealer-impulse-heat/</a><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif"><u></u> <u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif">This might be a faster and more economical alternative to a FOUP. If you want to try it first, perhaps to quantify native oxide regrowth after bagging, we can make that happen.
I’m only 45 minutes away.<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif"><u></u> <u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif">Best,<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif">Travis Massey, PhD<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif">Operations Manager | Center for Micro and Nano Technology (CMNT)<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif">Staff Scientist | Center for Bioengineering, Implantable Microsystems Group<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif">Lawrence Livermore National Laboratory<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif">7000 East Avenue, L-222<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif">Livermore, CA 94550<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif">925-495-7103 (cell/text) | 925-422-9509 (desk/vm)<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif"><u></u> <u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif"><u></u> <u></u></span></p>
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<p class="MsoNormal"><b><span style="font-size:11pt;font-family:Calibri,sans-serif">From:</span></b><span style="font-size:11pt;font-family:Calibri,sans-serif"> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Christopher Raum<br>
<b>Sent:</b> Tuesday, May 20, 2025 11:56 AM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] An R&D FOUP<u></u><u></u></span></p>
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<p class="MsoNormal"><u></u> <u></u></p>
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<p class="MsoNormal">Hi all,<u></u><u></u></p>
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<p class="MsoNormal"><u></u> <u></u></p>
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<p class="MsoNormal">I work between two fabs at UC Berkeley and part of my process flow involves shuttling wafers between those two fabs to their respective tools.<u></u><u></u></p>
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<p class="MsoNormal"><u></u> <u></u></p>
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<p class="MsoNormal">Currently I use a wafer box and double bag to ensure the wafers aren't contaminated by the environment outside the two fab labs. This is generally standard practice for transporting wafers outside a cleanroom.<u></u><u></u></p>
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<p class="MsoNormal"><u></u> <u></u></p>
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<p class="MsoNormal">But there are more complicated concerns. For example one fab lab has a wetbench used to remove native oxide from wafers, and when the next tool in the flow is in the same fab, I can minimize the regrowth of native oxide - but when I need
to transfer between fabs regrowth can become an issue.<u></u><u></u></p>
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<p class="MsoNormal"><u></u> <u></u></p>
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<p class="MsoNormal">In industry they use a FOUP (Front Opening Unified Pod) to move wafers around while controlling the environment the wafers sees. The pods can be purged with nitrogen (and perhaps placed under vacuum?) and I think they can also be light
tight to allow PR coated wafers to be transported in unfiltered light.<u></u><u></u></p>
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<p class="MsoNormal"><u></u> <u></u></p>
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<p class="MsoNormal"><a href="https://urldefense.us/v3/__https:/en.wikipedia.org/wiki/FOUP__;!!G2kpM7uM-TzIFchu!xXYGIqBlgS7Le4Za8tr2ifZ0wMGkbtkwRUOajwOg1qxuMwRsl6mbszS3s2hyUoD3V4Lfx9-UORxTvIkz$" target="_blank">https://en.wikipedia.org/wiki/FOUP</a><u></u><u></u></p>
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<p class="MsoNormal"><u></u> <u></u></p>
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<p class="MsoNormal">Since it's the industry that uses FOUPs, all the systems are for 12" and above wafers. I know I could never be so lucky, but I'll ask anyway - does anyone know of any FOUP systems that are fitted for six inch wafers?<u></u><u></u></p>
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<p class="MsoNormal"><u></u> <u></u></p>
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<p class="MsoNormal">Outside that possibility, my ask for the community is: Is there an interest in developing such a system? Some sort of crowdsourcing? There are many members of industry in this mailing list and I'm sure there would be quite a few academic
and research customers if someone wanted to develop and fabricate such a wafer transportation system.<u></u><u></u></p>
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<p class="MsoNormal"><u></u> <u></u></p>
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<p class="MsoNormal">I hope this post stimulates some interesting discussion.<u></u><u></u></p>
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<p class="MsoNormal"><u></u> <u></u></p>
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<p class="MsoNormal">-Chris<u></u><u></u></p>
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