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    <p>Hi all,</p>
    <p>We are working on installing a new VHF system and a PECVD in our
      lab.  We are looking at dry scrubbers for the gas abatement.  One
      question is whether we purchase one larger system for both tools
      or get a smaller one for each tool.  Has anyone manifolded two
      separate tools into one abatement scrubber?  </p>
    <p>I have 2 main concerns:</p>
    <p>- waste gas from one operating tool back-flowing into the other
      shut-down tool</p>
    <p>- 'using up' the neutralizing capacity for one tool before the
      other (i.e., heavier than expected usage on one tool resulting in
      a need to change the canister even though the other tool can be
      neutralized fine)</p>
    <p>I would appreciate any feedback folks could offer!</p>
    <p>Also, if you have any opinions on potential systems, please feel
      free to reach out to me directly.</p>
    <p>Thanks,</p>
    <p>Nathanael<br>
    </p>
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