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<p>Hi all,</p>
<p>We are working on installing a new VHF system and a PECVD in our
lab. We are looking at dry scrubbers for the gas abatement. One
question is whether we purchase one larger system for both tools
or get a smaller one for each tool. Has anyone manifolded two
separate tools into one abatement scrubber? </p>
<p>I have 2 main concerns:</p>
<p>- waste gas from one operating tool back-flowing into the other
shut-down tool</p>
<p>- 'using up' the neutralizing capacity for one tool before the
other (i.e., heavier than expected usage on one tool resulting in
a need to change the canister even though the other tool can be
neutralized fine)</p>
<p>I would appreciate any feedback folks could offer!</p>
<p>Also, if you have any opinions on potential systems, please feel
free to reach out to me directly.</p>
<p>Thanks,</p>
<p>Nathanael<br>
</p>
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