<!DOCTYPE html>
<html>
<head>
<meta http-equiv="Content-Type" content="text/html; charset=UTF-8">
</head>
<body>
Hi Nathanael,<br>
<br>
I have 3 dry bed system for 3 tools. Each tool has its own scrubber
because of chemical compatibility and where they are located but I
had two tools exhausted into one scrubber in the past. If
chemistries are compatible, you have to size things correctly and
have the proper resin mixture in the beds. You could get a system
with dual resin canisters so you do not have multiple tools down
when they are depleted.<br>
<br>
Iulian<br>
<pre class="moz-signature" cols="72">iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
<a class="moz-txt-link-freetext" href="https://udnf.udel.edu">https://udnf.udel.edu</a></pre>
<div class="moz-cite-prefix">On 7/10/2025 8:17 PM, Nathanael Sieb
wrote:<br>
</div>
<blockquote type="cite"
cite="mid:fdd1aa6f-19d4-419d-a13a-d238f5cea846@4dlabs.ca">
<meta http-equiv="content-type" content="text/html; charset=UTF-8">
<p>Hi all,</p>
<p>We are working on installing a new VHF system and a PECVD in
our lab. We are looking at dry scrubbers for the gas
abatement. One question is whether we purchase one larger
system for both tools or get a smaller one for each tool. Has
anyone manifolded two separate tools into one abatement
scrubber? </p>
<p>I have 2 main concerns:</p>
<p>- waste gas from one operating tool back-flowing into the other
shut-down tool</p>
<p>- 'using up' the neutralizing capacity for one tool before the
other (i.e., heavier than expected usage on one tool resulting
in a need to change the canister even though the other tool can
be neutralized fine)</p>
<p>I would appreciate any feedback folks could offer!</p>
<p>Also, if you have any opinions on potential systems, please
feel free to reach out to me directly.</p>
<p>Thanks,</p>
<p>Nathanael<br>
</p>
<div class="moz-signature">
<meta http-equiv="content-type"
content="text/html; charset=UTF-8">
<title></title>
<div id="Signature">
<p
style="font-family:Arial,Helvetica,sans-serif; font-size:13.3333px"> <b
style="font-family:Calibri,Helvetica,sans-serif; font-size:16px"> <span
style="font-family:Arial,Helvetica,sans-serif; font-size:10pt">Nathanael
Sieb</span> </b> <br
style="font-family:Calibri,Helvetica,sans-serif; font-size:16px">
<span
style="font-family:Arial,Helvetica,sans-serif; font-size:10pt"><span
style="font-size:10pt">Director of Operations and
Administration</span> <span style="font-size:10pt"> |
<a href="http://www.4dlabs.ca/" class="OWAAutoLink"
id="LPNoLP" tabindex="-1" disabled="true"
moz-do-not-send="true">4D LABS</a> </span> <br
style="font-family:Calibri,Helvetica,sans-serif; font-size:16px">
<span
style="font-family:Arial,Helvetica,sans-serif; font-size:10pt">Simon
Fraser University</span> <br
style="font-family:Calibri,Helvetica,sans-serif; font-size:16px">
<span
style="font-family:Arial,Helvetica,sans-serif; font-size:10pt">8888
University Dr., Burnaby, B.C. V5A 1S6</span> <br
style="font-family:Calibri,Helvetica,sans-serif; font-size:16px">
<span
style="font-family:Arial,Helvetica,sans-serif; font-size:10pt">T:
778.782.8084 | F: 778.782.3765 | <a
href="http://www.4dlabs.ca" class="OWAAutoLink"
id="LPNoLP" tabindex="-1" disabled="true"
moz-do-not-send="true">www.4dlabs.ca</a></span> <br
style="font-family:Calibri,Helvetica,sans-serif; font-size:16px">
<span
style="font-family:Arial,Helvetica,sans-serif; font-size:10pt"> <a
href="https://www.facebook.com/4dlabs/"
class="OWAAutoLink" id="LPNoLP" tabindex="-1"
disabled="true" moz-do-not-send="true">Facebook</a> |
<a href="https://twitter.com/4D_LABS"
class="OWAAutoLink" id="LPNoLP" tabindex="-1"
disabled="true" moz-do-not-send="true">Twitter</a> | <a
href="https://www.linkedin.com/company/sfu-4d-labs/about/"
class="OWAAutoLink" id="LPNoLP" tabindex="-1"
disabled="true" moz-do-not-send="true">LinkedIn</a> </span></span></p>
<p
style="font-family:Arial,Helvetica,sans-serif; font-size:14px"> </p>
<p
style="font-family:Arial,Helvetica,sans-serif; font-size:14px"> <img
class="EmojiInsert" size="0" id="OWAPstImg82800"
src="http://www.4dlabs.ca/content/dam/sfu/4dlabs/images/SFU_4DLabs_logo.png"
width="200" height="41" tabindex="-1" disabled="true"
moz-do-not-send="true"></p>
<p><b>Reminder:</b> 4D LABS has a <a
href="http://www.4dlabs.ca/about/acknowledging-4d-labs.html"
moz-do-not-send="true">publication acknowledgement policy</a></p>
<a
href="http://www.4dlabs.ca/about/acknowledging-4d-labs.html"
moz-do-not-send="true"> </a></div>
<a href="http://www.4dlabs.ca/about/acknowledging-4d-labs.html"
moz-do-not-send="true"> </a></div>
<br>
<fieldset class="moz-mime-attachment-header"></fieldset>
<pre wrap="" class="moz-quote-pre">_______________________________________________
labnetwork mailing list
<a class="moz-txt-link-abbreviated" href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>
<a class="moz-txt-link-freetext" href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a>
</pre>
</blockquote>
<br>
</body>
</html>