<html><head><meta http-equiv="content-type" content="text/html; charset=utf-8"></head><body dir="auto">Hi Nathaniel,<div><br></div><div>I’d happily suggest Critical Systems Inc for this type of project. I was most recently at U-O and had them do the entire gas delivery and abatement systems for us. I had a dedicated (dry) scrubber put in for the PECVD, and we had automatic switchover to a smaller column in case of saturation. </div><div><br></div><div>Their team should be able to look at your process gas flows and determine if and how best to tie your two tools together. I’d be happy to send an introductory email to you and the CSI team if you’d like.</div><div><br></div><div>Thanks!</div><div><br></div><div><div><div dir="ltr">-Leslie </div><div dir="ltr"><br><blockquote type="cite">On Jul 11, 2025, at 4:38 AM, Nathanael Sieb <sieb@4dlabs.ca> wrote:<br><br></blockquote></div><blockquote type="cite"><div dir="ltr">
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<p>Hi all,</p>
<p>We are working on installing a new VHF system and a PECVD in our
lab. We are looking at dry scrubbers for the gas abatement. One
question is whether we purchase one larger system for both tools
or get a smaller one for each tool. Has anyone manifolded two
separate tools into one abatement scrubber? </p>
<p>I have 2 main concerns:</p>
<p>- waste gas from one operating tool back-flowing into the other
shut-down tool</p>
<p>- 'using up' the neutralizing capacity for one tool before the
other (i.e., heavier than expected usage on one tool resulting in
a need to change the canister even though the other tool can be
neutralized fine)</p>
<p>I would appreciate any feedback folks could offer!</p>
<p>Also, if you have any opinions on potential systems, please feel
free to reach out to me directly.</p>
<p>Thanks,</p>
<p>Nathanael<br>
</p>
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