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<p class="MsoNormal"><span style="font-size:11.0pt">Hi Nathanael,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">We have 3 dry bed systems; 2 have more than 1 tool going to them. It’s generally considered bad practice in industry, but given R&D flow rates and utilization we felt the benefits far outweighed the cons.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Prior to installing in this configuration, we conducted a formal risk assessment (e.g. FMEA) and included all of the process conditions in our RFP, to ensure vendor alignment/acceptance of the methodology.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">It’s a much longer discussion to review all the safety implications (material compatibility, flow rates, failure modes etc)…But the heavy hitters: redundant exhaust monitoring (TGMS and local – no potential
for backflow), breakthrough/temperature monitoring, service contract support, remote system status monitoring and an integrated bypass canister.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Best,<o:p></o:p></span></p>
<div>
<p class="MsoNormal" style="background:white"><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">Nicholas Menounos, </span></b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">PE, LEED AP</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black">Associate Director of Infrastructure</span><span style="font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><b><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#212121"> </span></b><span style="font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><b><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#212121">MIT.nano</span></b><span style="font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><b><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black">Massachusetts Institute of Technology</span></b><span style="font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black">77 Massachusetts Ave, Bldg 12-5007</span><span style="font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black">Cambridge, MA 02139</span><span style="font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black">Cell: </span><span style="color:black;mso-ligatures:standardcontextual"><a href="tel:+15089320938"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;mso-ligatures:none">(508)
932-0938</span></a></span><span style="font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black">Office: </span><span style="color:black;mso-ligatures:standardcontextual"><a href="tel:+16172537234"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;mso-ligatures:none">(617)
253-7234</span></a></span><span style="font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black">Email: </span><span style="mso-ligatures:standardcontextual"><a href="mailto:Menounos@mit.edu"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;mso-ligatures:none">Menounos@mit.edu</span></a><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Nathanael Sieb<br>
<b>Sent:</b> Thursday, July 10, 2025 8:17 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] gas abatement question<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p>Hi all,<o:p></o:p></p>
<p>We are working on installing a new VHF system and a PECVD in our lab. We are looking at dry scrubbers for the gas abatement. One question is whether we purchase one larger system for both tools or get a smaller one for each tool. Has anyone manifolded
two separate tools into one abatement scrubber? <o:p></o:p></p>
<p>I have 2 main concerns:<o:p></o:p></p>
<p>- waste gas from one operating tool back-flowing into the other shut-down tool<o:p></o:p></p>
<p>- 'using up' the neutralizing capacity for one tool before the other (i.e., heavier than expected usage on one tool resulting in a need to change the canister even though the other tool can be neutralized fine)<o:p></o:p></p>
<p>I would appreciate any feedback folks could offer!<o:p></o:p></p>
<p>Also, if you have any opinions on potential systems, please feel free to reach out to me directly.<o:p></o:p></p>
<p>Thanks,<o:p></o:p></p>
<p>Nathanael<o:p></o:p></p>
<div>
<div id="Signature">
<p><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif">Nathanael Sieb</span></b><b><span style="font-family:"Calibri",sans-serif">
</span></b><span style="font-family:"Calibri",sans-serif"><br>
</span><span style="font-size:10.0pt;font-family:"Arial",sans-serif">Director of Operations and Administration |
<a href="http://www.4dlabs.ca/">4D LABS</a> </span><span style="font-family:"Calibri",sans-serif"><br>
</span><span style="font-size:10.0pt;font-family:"Arial",sans-serif">Simon Fraser University
</span><span style="font-family:"Calibri",sans-serif"><br>
</span><span style="font-size:10.0pt;font-family:"Arial",sans-serif">8888 University Dr., Burnaby, B.C. V5A 1S6
</span><span style="font-family:"Calibri",sans-serif"><br>
</span><span style="font-size:10.0pt;font-family:"Arial",sans-serif">T: 778.782.8084 | F: 778.782.3765 | <a href="http://www.4dlabs.ca">www.4dlabs.ca</a>
</span><span style="font-family:"Calibri",sans-serif"><br>
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