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We can grow BN using both thermal and PEALD here at Penn State if you want to try other ways than sputtering.</div>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of William Hyland <whyland@uchicago.edu><br>
<b>Sent:</b> Friday, July 11, 2025 5:11:53 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] Boron Nitride Sputtering</font>
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<p class="x_MsoNormal"><span style="font-size:11.0pt">Hi All,</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt"> </span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt">Does anyone have any experience/insight on Boron Nitride sputtering? Our main concern with introducing this target into our sputter system is that of chamber contamination. Considering Boron is used as a
dopant; we suspect that it could affect future depositions in that system. I look forward to hearing your responses.
</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt"> </span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt">Thanks,</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt">Will </span></p>
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<p class="x_MsoNormal"><b><span style="font-size:10.5pt; font-family:"Arial",sans-serif; color:black; background:white">Will Hyland</span></b><b><span style="font-size:11.0pt; font-family:"Calibri",sans-serif"></span></b></p>
<p class="x_MsoNormal"><b><span style="font-size:10.5pt; font-family:"Arial",sans-serif; color:black; background:white">Associate Process & Equipment Engineer</span></b><b><span style="font-size:11.0pt; font-family:"Calibri",sans-serif"></span></b></p>
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