<html><head><meta http-equiv="content-type" content="text/html; charset=utf-8"></head><body dir="auto">Hello,<div>Yes, the sputtering chamber and accessories get contaminated with traces of every substances which are present in the targets composition.</div><div>You can mitigate this, on one hand by using electronic grade targets.</div><div><br></div><div>We sputtered Solid Boron Nitride “BN” , used for Boron doping in the high temperature furnaces, a classical dedicated process.</div><div>The cold low temperature sputtering, allows selectively Boron doping by using the </div><div>Lift- Off technique.</div><div>Thanks, Andrei</div><div><br></div><div><div dir="ltr">Sent from my iPad</div><div dir="ltr"><br><blockquote type="cite">On Jul 11, 2025, at 7:41 PM, William Hyland <whyland@uchicago.edu> wrote:<br><br></blockquote></div><blockquote type="cite"><div dir="ltr">
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<p class="MsoNormal"><span style="font-size:11.0pt">Hi All,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Does anyone have any experience/insight on Boron Nitride sputtering? Our main concern with introducing this target into our sputter system is that of chamber contamination. Considering Boron is used as a dopant;
we suspect that it could affect future depositions in that system. I look forward to hearing your responses.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Thanks,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Will <o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black;background:white;mso-ligatures:none">Will Hyland</span></b><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-ligatures:none"><o:p></o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black;background:white;mso-ligatures:none">Associate Process & Equipment Engineer</span></b><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-ligatures:none"><o:p></o:p></span></b></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black;background:white;mso-ligatures:none"> <o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:maroon;background:white;mso-ligatures:none">Pritzker Nanofabrication Facility</span><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black;background:white;mso-ligatures:none">
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</span><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black;mso-ligatures:none">University of Chicago<br>
<span style="background:white">Eckhardt Research Center</span><br>
<span style="background:white">5640 S. Ellis Ave., </span>Room LL180 </span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black;mso-ligatures:none">Chicago, IL 60637 <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black;background:white;mso-ligatures:none">773.834.4978
</span><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black;mso-ligatures:none">office<br>
<br>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black;background:white;mso-ligatures:none"><a href="mailto:whyland@uchicago.edu">whyland@uchicago.edu</a></span><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:#00B0F0;mso-ligatures:none">
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</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-ligatures:none"><a href="http://pme.uchicago.edu/"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;background:white">pme.uchicago.edu</span></a><o:p></o:p></span></p>
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