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<p class="MsoNormal">Dear colleagues,<o:p></o:p></p>
<p class="MsoNormal">We have a couple of systems we are looking to remove from our cleanroom. We are open to selling these. All reasonable offers from interested partied will be considered.<o:p></o:p></p>
<p class="MsoNormal">Please contact me directly at <a href="mailto:aamer@uchicago.edu">
aamer@uchicago.edu</a> if you are interested.<o:p></o:p></p>
<p class="MsoListParagraph"><b><o:p> </o:p></b></p>
<ol style="margin-top:0in" start="1" type="1">
<li class="MsoListParagraph" style="margin-left:0in;mso-list:l3 level1 lfo3"><b>Horiba UVISEL2 Spectroscopic Ellipsometer (System does not work but can be used for parts)<o:p></o:p></b></li></ol>
<ul style="margin-top:0in" type="disc">
<li class="MsoListParagraph" style="margin-left:0in;mso-list:l0 level1 lfo4">Wavelength range: 190nm - 2100nm<o:p></o:p></li><li class="MsoListParagraph" style="margin-left:0in;mso-list:l0 level1 lfo4">Automated variable angle from 35deg to 90deg<o:p></o:p></li><li class="MsoListParagraph" style="margin-left:0in;mso-list:l0 level1 lfo4">Automated stage, 200mm x 200mm x 35mm<o:p></o:p></li><li class="MsoListParagraph" style="margin-left:0in;mso-list:l0 level1 lfo4">Spot size 35um x 85um up to 705um x 2030um<o:p></o:p></li><li class="MsoListParagraph" style="margin-left:0in;mso-list:l0 level1 lfo4">Imaging camera for spot placement<o:p></o:p></li><li class="MsoListParagraph" style="margin-left:0in;mso-list:l0 level1 lfo4">Capable of Mueller Matrix measurement<o:p></o:p></li><li class="MsoListParagraph" style="margin-left:0in;mso-list:l0 level1 lfo4">Uses a photoelastic modulator for polarization<o:p></o:p></li></ul>
<ul style="margin-top:0in" type="disc">
<ul style="margin-top:0in" type="disc">
<li class="MsoListParagraph" style="margin-left:0in;mso-list:l1 level2 lfo6">Currently the IR spectrum doesn’t work<o:p></o:p></li><li class="MsoListParagraph" style="margin-left:0in;mso-list:l1 level2 lfo6">The goniometers sometimes freeze<o:p></o:p></li><li class="MsoListParagraph" style="margin-left:0in;mso-list:l1 level2 lfo6">And we haven’t been able to align the beam because something is probably misaligned in the optics.<o:p></o:p></li></ul>
</ul>
<p class="MsoNormal"><o:p> </o:p></p>
<ol style="margin-top:0in" start="2" type="1">
<li class="MsoListParagraph" style="margin-left:0in;mso-list:l3 level1 lfo3"><b>3C Technical GCA AutoStep 200 5x Reduction Stepper (System works and was maintained by a service contract, but is currently powered off)<o:p></o:p></b></li></ol>
<ul style="margin-top:0in" type="disc">
<li class="MsoListParagraph" style="margin-left:0in;mso-list:l4 level1 lfo5">The GCA AutoStep 200 Stepper is an I-line 5x reduction stepper with repeat exposure capabilities. It is capable of submicron resolution and high accuracy alignment.<o:p></o:p></li><li class="MsoNormal" style="mso-list:l4 level1 lfo5">21 mm dia exposure field (up to 14.8 X 14.8 mm square)<o:p></o:p></li><li class="MsoNormal" style="mso-list:l4 level1 lfo5">Can achieve resolution < 600 nm<o:p></o:p></li><li class="MsoNormal" style="mso-list:l4 level1 lfo5">200 mm wafer stage<o:p></o:p></li><li class="MsoNormal" style="mso-list:l4 level1 lfo5">Stage precision < 100 nm<o:p></o:p></li><li class="MsoNormal" style="mso-list:l4 level1 lfo5">Accommodates wafer sizes from 1 cm pieces to 6” wafers<o:p></o:p></li><li class="MsoNormal" style="mso-list:l4 level1 lfo5">Automatic reticle transfer alignment through RMS (reticle management system)<o:p></o:p></li><li class="MsoNormal" style="mso-list:l4 level1 lfo5">Exposure wavelength of 365 nm<o:p></o:p></li></ul>
<div>
<p class="MsoNormal"><span style="mso-ligatures:standardcontextual"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="mso-ligatures:standardcontextual">Thanks,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-ligatures:standardcontextual"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="mso-ligatures:standardcontextual">--<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-ligatures:standardcontextual">Aamer Mahmood<o:p></o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;mso-ligatures:standardcontextual"><o:p> </o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;mso-ligatures:standardcontextual">Executive Director<o:p></o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;mso-ligatures:standardcontextual">Pritzker Nanofabrication Facility<o:p></o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;mso-ligatures:standardcontextual">William Eckhardt Research Center<o:p></o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;mso-ligatures:standardcontextual">University of Chicago<o:p></o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;mso-ligatures:standardcontextual">5640 S. Ellis Ave., Chicago, IL 60637<o:p></o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;mso-ligatures:standardcontextual"><o:p> </o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;mso-ligatures:standardcontextual">Tel: +1 (773) 702 8903<o:p></o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;mso-ligatures:standardcontextual">Web:
<a href="pnf.uchicago.edu"><span style="color:#467886">pnf.uchicago.edu</span></a><o:p></o:p></span></b></p>
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