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HI Steve,</div>
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Hope you are doing well. Did you consider buying the MKS/ENI 3KW 13.56 MHz Rf generator? We had issue with our 1500W RF generator and we did approach MKS for repairs, initially they did accept the unit for repair however they returned the
unit back stating they don't service them as parts for the units are no longer available. If I may ask what went wrong with your existing generator? </div>
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Did you consider the following unit? Its a 3KW unit with very similar characteristics.....in fact it might be possible to suppliment 1500W unit with 3KW unit if the machine interface is modified slightly. </div>
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<a id="LPlnk278059" href="https://www.ebay.co.uk/itm/306087290890">https://www.ebay.co.uk/itm/306087290890</a></div>
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Warm Regards</div>
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Rohit Khanna</div>
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Electronic Test & Measurement Engineer</div>
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London Centre for NANO Technology, UCL</div>
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Ph:+44-020-76799984</div>
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<span style="font-family: "Freestyle Script"; font-size: 18pt; color: rgb(33, 33, 33);">Lab:
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Int Ext: 39984</div>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Paolini, Steven <spaolini@cns.fas.harvard.edu><br>
<b>Sent:</b> 01 August 2025 19:41<br>
<b>To:</b> Fab Network <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] Looking for a particular RF generator</font>
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<p class="x_MsoNormal"><span style="font-size:11.0pt">Dear fellow fabbers,</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt"> I am looking for an RF generator for an older STS ICP.</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt">The generator as an MKS/ENI Spectrum model B1513. The specs are: 13.56 MHZ, 1500W, liquid cooled and is sized for a half rack mount. The part# is: S-04-049A.</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt">We are willing to pay good money if anyone has one that they can spare.</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt">Thanks in advance!</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt"> </span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt">Equipment Dood.</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt"> </span></p>
<p class="x_MsoNormal"><span style="font-size:14.0pt">Steve Paolini</span></p>
<p class="x_MsoNormal"><span style="font-size:14.0pt">Principal Equipment Engineer</span></p>
<p class="x_MsoNormal"><span style="font-size:14.0pt">Harvard University Center for Nanoscale Systems</span></p>
<p class="x_MsoNormal"><span style="font-size:14.0pt">11 Oxford St.</span></p>
<p class="x_MsoNormal"><span style="font-size:14.0pt">Cambridge, MA 02138</span></p>
<p class="x_MsoNormal"><span style="font-size:14.0pt">617- 496- 9816</span></p>
<p class="x_MsoNormal"><span style="font-size:14.0pt">spaolini@cns.fas.harvard.edu</span></p>
<p class="x_MsoNormal"><span style="font-size:14.0pt">www.cns.fas.harvard.edu</span><span style="font-size:14.0pt"></span></p>
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