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<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif">Dear All from the Labnetwork community,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif">Recently, our lab received a request to deposit a 750 nm aluminum film on a 200 mm Si substrate using e-beam evaporation. The deposition was carried out with an
aluminum slug in a 40 cc water-cooled pocket. The process proceeded smoothly with stable rate, power, and pressure.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif">However, upon initial microscopic inspection, the deposited aluminum film exhibited numerous black dots distributed across the entire wafer. We attempted several
approaches to eliminate these defects, but so far have been unsuccessful.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif">I am wondering if anyone has encountered similar issues when depositing thick aluminum films. Any insights or suggestions on how to address this problem would be
greatly appreciated.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif">Details of the evaporation:<o:p></o:p></span></p>
<ul style="margin-top:0cm" type="disc">
<li class="MsoListParagraph" style="margin-left:0cm;mso-list:l0 level1 lfo3"><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif">Deposition rate: 1 A/s<o:p></o:p></span></li><li class="MsoListParagraph" style="margin-left:0cm;mso-list:l0 level1 lfo3"><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif">Deposition power: ~20%
<o:p></o:p></span></li><li class="MsoListParagraph" style="margin-left:0cm;mso-list:l0 level1 lfo3"><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif">Deposition pressure: ~5E-7 mbar<o:p></o:p></span></li><li class="MsoListParagraph" style="margin-left:0cm;mso-list:l0 level1 lfo3"><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif">Substrate cooling: No (Wafer were placed on a planar wafer holder)<o:p></o:p></span></li><li class="MsoListParagraph" style="margin-left:0cm;mso-list:l0 level1 lfo3"><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif">Throw distance: 1 m
<o:p></o:p></span></li></ul>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif">Approaches we have already tried:<o:p></o:p></span></p>
<ul style="margin-top:0cm" type="disc">
<li class="MsoListParagraph" style="margin-left:0cm;mso-list:l3 level1 lfo4"><b><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif">AFM/SEM characterization</span></b><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif">
– The black dots varied in size, with the largest reaching ~200 nm in diameter. Their morphology was pyramid-like, featuring a central peak surrounded by some trenches.<o:p></o:p></span></li><li class="MsoListParagraph" style="margin-left:0cm;mso-list:l3 level1 lfo4"><b><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif">EDX analysis</span></b><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif"> – The
black dots were identified as aluminum.<o:p></o:p></span></li><li class="MsoListParagraph" style="margin-left:0cm;mso-list:l3 level1 lfo4"><b><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif">FIB analysis
</span></b><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif">– There was no cavity inside the black dots.<o:p></o:p></span></li><li class="MsoListParagraph" style="margin-left:0cm;mso-list:l3 level1 lfo4"><b><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif">Adhesion layer</span></b><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif"> –
Adding a 75 nm Ti adhesion layer yielded no improvement.<o:p></o:p></span></li><li class="MsoListParagraph" style="margin-left:0cm;mso-list:l3 level1 lfo4"><b><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif">Different deposition rate at 5 A/s and 0.5 A/s</span></b><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif">
– Both yielded no improvement. <o:p></o:p></span></li><li class="MsoListParagraph" style="margin-left:0cm;mso-list:l3 level1 lfo4"><b><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif">Thickness variation</span></b><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif">
– Depositions at 200 nm, 400 nm, and 600 nm were tested. Defects only appeared in the 600 nm Al layer. All wafers exhibited similar film stress.<o:p></o:p></span></li><li class="MsoListParagraph" style="margin-left:0cm;mso-list:l3 level1 lfo4"><b><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif">Pre-melted aluminum pellets</span></b><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif">
– Using a carbon crucible liner, reduced deposition power, and the same rate resulted in an increased number of black dots.<o:p></o:p></span></li><li class="MsoListParagraph" style="margin-left:0cm;mso-list:l3 level1 lfo4"><b><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif">Multiple-stage deposition
</span></b><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif">– Depositing 400 nm with a liner, pausing for 30 minutes, and then depositing an additional 350 nm yielded no improvement.<o:p></o:p></span></li><li class="MsoListParagraph" style="margin-left:0cm;mso-list:l3 level1 lfo4"><b><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif">Alternative substrates</span></b><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif">
– Depositions on Si substrates with thermal oxide and on fused silica showed no improvement.<o:p></o:p></span></li></ul>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif">Attached are the microscope image, AFM image, and SEM image for your reference.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif">Thanks and best regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif">Guoliang<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;color:#000001;mso-ligatures:none;mso-fareast-language:DE-AT">Guoliang</span><span style="font-size:1.0pt;font-family:"Times New Roman",serif;color:white;mso-ligatures:none;mso-fareast-language:DE-AT"></span><span style="mso-ligatures:none;mso-fareast-language:DE-AT"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;color:#000001;mso-ligatures:none;mso-fareast-language:DE-AT"> </span><span style="mso-ligatures:none;mso-fareast-language:DE-AT"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;color:#000001;mso-ligatures:none;mso-fareast-language:DE-AT">Wang MSc</span><span style="mso-ligatures:none;mso-fareast-language:DE-AT"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;color:#000001;mso-ligatures:none;mso-fareast-language:DE-AT">Process Engineer</span><span style="mso-ligatures:none;mso-fareast-language:DE-AT"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;color:#000001;mso-ligatures:none;mso-fareast-language:DE-AT">SAL MicroFab</span><span style="mso-ligatures:none;mso-fareast-language:DE-AT"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;color:#000001;mso-ligatures:none;mso-fareast-language:DE-AT">Silicon Austria Labs GmbH</span><span style="mso-ligatures:none;mso-fareast-language:DE-AT"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:9.0pt;color:#000001;mso-ligatures:none;mso-fareast-language:DE-AT">High Tech Campus Villach - Europastraße 12</span><span lang="EN-US" style="mso-ligatures:none;mso-fareast-language:DE-AT"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;color:#000001;mso-ligatures:none;mso-fareast-language:DE-AT">A‑</span><span style="mso-ligatures:none;mso-fareast-language:DE-AT"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;color:#000001;mso-ligatures:none;mso-fareast-language:DE-AT">9524</span><span style="mso-ligatures:none;mso-fareast-language:DE-AT"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;color:#000001;mso-ligatures:none;mso-fareast-language:DE-AT">Villach</span><span style="mso-ligatures:none;mso-fareast-language:DE-AT"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;color:#000001;mso-ligatures:none;mso-fareast-language:DE-AT">, </span><span style="mso-ligatures:none;mso-fareast-language:DE-AT"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;color:#000001;mso-ligatures:none;mso-fareast-language:DE-AT">AT</span><span style="mso-ligatures:none;mso-fareast-language:DE-AT"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;color:#000001;mso-ligatures:none;mso-fareast-language:DE-AT">M: +4366488843743</span><span style="mso-ligatures:none;mso-fareast-language:DE-AT"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;color:#009A9B;mso-ligatures:none;mso-fareast-language:DE-AT"><a href="mailto:guoliang.wang@silicon-austria.com" target="_blank"><span style="color:#009A9B">guoliang.wang@silicon-austria.com</span></a></span><span style="mso-ligatures:none;mso-fareast-language:DE-AT"><o:p></o:p></span></p>
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