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<p class="MsoNormal"><span style="font-size:11.0pt">Lab Network Experts,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Anyone here doing sputtering of pure copper and can offer any advice concerning tool issues associated with doing that? We already have evaporated copper used in a variety of processes, so we are not worried
about transistor contamination concerns, but more related to tool issues such as impacts on other films in the same tool or vacuum issues. Any thoughts the community can share would be appreciated. Thank you.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Dan<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Daniel Woodie<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Director, Micro/Nanofabrication Center, Princeton Materials Institute<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Princeton University<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">155 Andlinger Center<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">86 Olden St<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Princeton, NJ 08540<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">(609)258-5922 (office)<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">(607)227-2993 (cell)<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><a href="mailto:daniel.woodie@princeton.edu">daniel.woodie@princeton.edu</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><a href="https://mnfc.princeton.edu/">mnfc.princeton.edu</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><a href="http://www.linkedin.com/in/danielpwoodie/">www.linkedin.com/in/danielpwoodie</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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