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<p class="MsoNormal">Hi Pial,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Most magnetron sputtering cathodes require a high strength magnet set up to sputter targets with high magnetic permeability like NiFe. Also they require the target to be as close to the cooling well/magnet set as possible – therefore there
should not be a backing plate on the NiFe target the target should sit directly on the sputtering gun.
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">One way to tell for sure is that if the magnetic field is too weak, the DC power supply will output all voltage and very little to no current. So monitor voltage when this gun has power applied to it. If the voltage goes high and there
is no plasma this means that most likely the magnets and/ or the target configuration are wrong.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Rob<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Mohammad Mohtasim Hamid Pial<br>
<b>Sent:</b> Monday, October 13, 2025 4:32 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Issue Striking Plasma for NiFe Sputtering on Angstrom Nexdep PVD System – Need Guidance<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<span style="font-size:9.0pt;font-family:wf_segoe-ui_normal;color:#212121">You don't often get email from
<a href="mailto:mpial001@fiu.edu">mpial001@fiu.edu</a>. <a href="https://aka.ms/LearnAboutSenderIdentification">
Learn why this is important</a> <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Dear All,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:black">I am attempting to deposit NiFe using a magnetron sputtering setup (Angstrom Engineering – Nexdep PVD platform). Below are my target specifications and sputtering parameters:<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Target: NiFe (2" dia × 1 mm, 4N purity) bonded to a 1/8" Cu backing plate<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Sputtering Method: DC Magnetron Sputtering<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">DC Power: 100–150 W<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Base Pressure: ~10</span><span style="font-family:"Cambria Math",serif;color:black">⁻</span><span style="color:black">⁶ Torr<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Ar Gas Flow Rate: 20–30 sccm<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Working Pressure: 3–5 mTorr<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:black">However, I am unable to ignite the plasma. The DC power supply setpoint keeps blinking and the power stalls around 15 W before dropping <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Could this issue be due to insufficient magnetic field strength (not penetrating the thick target/Cu backing), or is the target too thick for effective plasma ignition? Do I need a thinner target or additional
magnetic confinement?<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:black">I would greatly appreciate any insights or recommendations from anyone who has sputtered NiFe or similar high-permeability alloys on this platform.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Thank you in advance!<br>
Pial<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Segoe UI",sans-serif;color:#555555"><o:p> </o:p></span></p>
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