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Hi Hossein,<br>
<br>
I have my e-beam writer and the SEM on UPSes. The UPSes are fed from
a power panel that is backed by the building's emergency generators.<br>
<br>
The one on the SEM is a 8 kVA PowerVar.<br>
<br>
The one on the e-beam writer is a 20 KVA Liebert NX.<br>
<br>
They've been in operation for about 10 years and proven reliable.<br>
<br>
I have them serviced once a year.<br>
<br>
Cheers,<br>
<br>
Iulian<br>
<br>
<pre class="moz-signature" cols="72">iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
<a class="moz-txt-link-freetext" href="https://udnf.udel.edu">https://udnf.udel.edu</a></pre>
<br>
<div class="moz-cite-prefix">On 10/20/2025 11:56 AM, Alizadeh,
Hossein wrote:<br>
</div>
<blockquote type="cite"
cite="mid:CO1PR03MB5763485BFE22A1C6222E7A77A1F5A@CO1PR03MB5763.namprd03.prod.outlook.com">
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style="font-family: Verdana, Geneva, sans-serif; font-size: 10pt; color: rgb(0, 0, 0);"
class="elementToProof">
Hi everyone,</div>
<div
style="margin-top: 1em; margin-bottom: 1em; font-family: Verdana, Geneva, sans-serif; font-size: 10pt; color: rgb(0, 0, 0);"
class="elementToProof">
We recently experienced a power outage that caused damage to
several of our high-vac systems. We’re now considering
installing UPS units for some of our more sensitive tools
(etchers, SEMs, TEM) One key question is whether to use
double-conversion UPS systems or opt for less expensive
alternatives.</div>
<div
style="margin-top: 1em; margin-bottom: 1em; font-family: Verdana, Geneva, sans-serif; font-size: 10pt; color: rgb(0, 0, 0);"
class="elementToProof">
If you have experience using UPS systems with these types of
instruments, I’d appreciate any recommendations, guidance, or
brand suggestions you’ve found reliable. Your input would be
helpful as we evaluate the best option for our needs.</div>
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Best,</div>
<div
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Hossein</div>
<div
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<br>
</div>
<div
style="font-family: Georgia, serif; font-size: 12pt; color: rgb(0, 0, 0);">---------------------------------------------</div>
<div
style="font-family: Georgia, serif; font-size: 12pt; color: rgb(0, 0, 0);">Hossein
Alizadeh, PhD.</div>
<div
style="font-family: Georgia, serif; font-size: 12pt; color: rgb(0, 0, 0);">Technical
Director,</div>
<div
style="font-family: Georgia, serif; font-size: 12pt; color: rgb(0, 0, 0);">Photonics
Center, Boston University</div>
<div
style="font-family: Georgia, serif; font-size: 12pt; color: rgb(0, 0, 0);"><a class="moz-txt-link-abbreviated" href="mailto:halizade@bu.edu">halizade@bu.edu</a></div>
<div
style="font-family: Georgia, serif; font-size: 12pt; color: rgb(0, 0, 0);">617-353-0632</div>
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<br>
</div>
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<br>
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</blockquote>
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