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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Dear Labnetwork colleagues,<br>
<br>
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">I’m looking for some collective wisdom on Cu electroplating at 200 mm wafer level, specifically for redistribution layer (RDL) processes. I’ve never done electroplating so
fully aware of potential of falling into unforeseen potholes! Been told we would be doing ~ 2 wafers/week so not at all high throughput.<br>
<br>
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">We are currently looking at two vendors:<br>
<br>
<o:p></o:p></span></p>
<ul style="margin-top:0cm" type="disc">
<li class="MsoNormal" style="mso-list:l0 level1 lfo1"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Technic: Semcon 1000<o:p></o:p></span></li><li class="MsoNormal" style="mso-list:l0 level1 lfo1"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">ClassOne: Solstice LT3<br>
<br>
<o:p></o:p></span></li></ul>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">If you have experience with either of these tools (or similar 200 mm Cu plating systems), I’d really appreciate any feedback on:<br>
<br>
<o:p></o:p></span></p>
<ul style="margin-top:0cm" type="disc">
<li class="MsoNormal" style="mso-list:l1 level1 lfo2"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Process capability for fine-pitch RDL (uniformity, throwing power, defectivity, edge exclusion)<o:p></o:p></span></li><li class="MsoNormal" style="mso-list:l1 level1 lfo2"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Reliability, ease of maintenance, and real-world operator workload.
<o:p></o:p></span></li><li class="MsoNormal" style="mso-list:l1 level1 lfo2"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Bath management / additive control and any pitfalls or “gotchas”. We have limited staff and bath maintenance is one of the areas that I think
could be a real time sink.<o:p></o:p></span></li><li class="MsoNormal" style="mso-list:l1 level1 lfo2"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Integration issues (facility requirements, exhaust, waste handling, software, training, etc.)<o:p></o:p></span></li><li class="MsoNormal" style="mso-list:l1 level1 lfo2"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Anything you would do differently if you were specifying again<br>
<br>
<o:p></o:p></span></li></ul>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Off-list replies are also very welcome if you’d prefer not to comment on a public thread; I’m happy to summarise anonymised feedback back to the list if that’s useful.<br>
<br>
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Many thanks in advance for any insights you can share.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:4.0pt"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-ligatures:none;mso-fareast-language:EN-GB">Best wishes,<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:6.0pt"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-ligatures:none;mso-fareast-language:EN-GB">James<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-top:2.0pt"><span style="font-size:11.0pt;font-family:"Helvetica",sans-serif;color:#1E2142;mso-ligatures:none;mso-fareast-language:EN-GB">Dr. James Paul Grant</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-ligatures:none;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="margin-top:2.0pt"><i><span style="font-size:11.0pt;font-family:"Helvetica",sans-serif;color:#1E2142;mso-ligatures:none;mso-fareast-language:EN-GB">JWNC Head of Engineering and Process</span></i><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-ligatures:none;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="margin-top:2.0pt"><i><span style="font-size:11.0pt;font-family:"Helvetica",sans-serif;color:#1E2142;mso-ligatures:none;mso-fareast-language:EN-GB">Engineering and Process Team</span></i><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-ligatures:none;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="margin-top:2.0pt"><span style="font-size:11.0pt;font-family:"Helvetica",sans-serif;color:#003865;mso-ligatures:none;mso-fareast-language:EN-GB"><a href="mailto:james.grant@glasgow.ac.uk"><span style="color:blue">james.grant@glasgow.ac.uk</span></a></span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-ligatures:none;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;margin-bottom:4.0pt"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-ligatures:none;mso-fareast-language:EN-GB">
<img border="0" width="362" height="51" style="width:3.7708in;height:.5347in" id="Picture_x0020_1" src="cid:image001.png@01DC6443.E28F70B0"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:ArialMT;color:red;mso-ligatures:none;mso-fareast-language:EN-GB">
</span><span style="font-size:8.0pt;font-family:ArialMT;color:#005C8A;mso-ligatures:none;mso-fareast-language:EN-GB"><a href="http://www.jwnc.gla.ac.uk/"><span style="color:#005C8A">www.JWNC.gla.ac.uk</span></a></span><span style="font-size:8.0pt;font-family:ArialMT;color:#EC2129;mso-ligatures:none;mso-fareast-language:EN-GB"><br>
</span><span style="mso-fareast-language:EN-GB"><img border="0" width="10" height="10" style="width:.1041in;height:.1041in" id="Picture_x0020_2" src="cid:image002.jpg@01DC6443.E28F70B0"></span><span style="font-size:8.0pt;font-family:ArialMT;color:#EC2129;mso-ligatures:none;mso-fareast-language:EN-GB">
</span><span style="font-size:8.0pt;font-family:ArialMT;color:#005C8A;mso-ligatures:none;mso-fareast-language:EN-GB"><a href="LinkedIn.com/company/JWNC"><span style="color:#005C8A">LinkedIn.com/company/JWNC</span></a></span><span style="font-size:8.0pt;font-family:ArialMT;color:#EC2129;mso-ligatures:none;mso-fareast-language:EN-GB"><br>
</span><span style="mso-fareast-language:EN-GB"><img border="0" width="10" height="10" style="width:.1041in;height:.1041in" id="Picture_x0020_3" src="cid:image003.jpg@01DC6443.E28F70B0"></span><span style="font-size:8.0pt;font-family:ArialMT;color:#EC2129;mso-ligatures:none;mso-fareast-language:EN-GB">
</span><span style="font-size:8.0pt;font-family:ArialMT;color:#005C8A;mso-ligatures:none;mso-fareast-language:EN-GB"><a href="https://twitter.com/uofg_jwnc"><span style="color:#005C8A">@UofG_JWNC</span></a></span><span style="mso-ligatures:none;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
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