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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Dear Labnetwork colleagues,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">I’m looking for some advice on post-CMP wafer cleaning and would be very grateful for any experience you’re willing to share<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">At the James Watt Nanofabrication Centre (University of Glasgow) we are in the process of procuring a 200 mm CMP tool as part of a regional investment programme. The key processes
we need to support are:<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<ul style="margin-top:0cm" type="disc">
<li class="MsoNormal" style="mso-list:l1 level1 lfo1"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Cu RDL CMP, and<o:p></o:p></span></li><li class="MsoNormal" style="mso-list:l1 level1 lfo1"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Polymer (PI/PBO) via-reveal CMP.<o:p></o:p></span></li></ul>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">At present, we do not have a dedicated post-CMP cleaner or SRD, so we’re trying to understand what is realistically required to achieve good, repeatable results and avoid contamination
issues.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">I’d be very interested to hear:<o:p></o:p></span></p>
<ol style="margin-top:0cm" start="1" type="1">
<li class="MsoNormal" style="mso-list:l0 level1 lfo2"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">What tools you use for post-CMP cleaning<o:p></o:p></span></li><ul style="margin-top:0cm" type="circle">
<li class="MsoNormal" style="mso-list:l0 level2 lfo2"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Dedicated post-CMP cleaner (make/model?)<o:p></o:p></span></li><li class="MsoNormal" style="mso-list:l0 level2 lfo2"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">General-purpose wet bench + SRD<o:p></o:p></span></li><li class="MsoNormal" style="mso-list:l0 level2 lfo2"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Other approaches (e.g. IPA dryer, manual brush cleaning, etc.)<o:p></o:p></span></li></ul>
<li class="MsoNormal" style="mso-list:l0 level1 lfo2"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Your experience with Cu and polymer CMP specifically<o:p></o:p></span></li><ul style="margin-top:0cm" type="circle">
<li class="MsoNormal" style="mso-list:l0 level2 lfo2"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">How critical has a dedicated cleaner been in practice?<o:p></o:p></span></li><li class="MsoNormal" style="mso-list:l0 level2 lfo2"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Any particular challenges with particle removal, Cu contamination, or polymer residue?<o:p></o:p></span></li></ul>
<li class="MsoNormal" style="mso-list:l0 level1 lfo2"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Chemistries and sequences that have worked well<o:p></o:p></span></li><ul style="margin-top:0cm" type="circle">
<li class="MsoNormal" style="mso-list:l0 level2 lfo2"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">For Cu CMP (e.g. citric/chelator cleans, surfactants)<o:p></o:p></span></li><li class="MsoNormal" style="mso-list:l0 level2 lfo2"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">For polymer CMP (Polyimide/PBO)<o:p></o:p></span></li></ul>
<li class="MsoNormal" style="mso-list:l0 level1 lfo2"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">If you started without a post-CMP cleaner, did you later add one?<o:p></o:p></span></li><ul style="margin-top:0cm" type="circle">
<li class="MsoNormal" style="mso-list:l0 level2 lfo2"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">What drove that decision and which tool did you choose?<o:p></o:p></span></li></ul>
</ol>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Budget is a constraint for us at the moment, so I’m especially interested in “minimum viable” but robust solutions, as well as any lessons learned from upgrading to more advanced
cleaning tools later.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Happy to summarise responses back to the list if that would be useful to others.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Many thanks in advance for any insights,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:4.0pt"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-ligatures:none;mso-fareast-language:EN-GB">Best wishes,<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:6.0pt"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-ligatures:none;mso-fareast-language:EN-GB">James<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-top:2.0pt"><span style="font-size:11.0pt;font-family:"Helvetica",sans-serif;color:#1E2142;mso-ligatures:none;mso-fareast-language:EN-GB">Dr. James Paul Grant</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-ligatures:none;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="margin-top:2.0pt"><i><span style="font-size:11.0pt;font-family:"Helvetica",sans-serif;color:#1E2142;mso-ligatures:none;mso-fareast-language:EN-GB">JWNC Head of Engineering and Process</span></i><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-ligatures:none;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="margin-top:2.0pt"><i><span style="font-size:11.0pt;font-family:"Helvetica",sans-serif;color:#1E2142;mso-ligatures:none;mso-fareast-language:EN-GB">Engineering and Process Team</span></i><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-ligatures:none;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="margin-top:2.0pt"><span style="font-size:11.0pt;font-family:"Helvetica",sans-serif;color:#003865;mso-ligatures:none;mso-fareast-language:EN-GB"><a href="mailto:james.grant@glasgow.ac.uk"><span style="color:blue">james.grant@glasgow.ac.uk</span></a></span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-ligatures:none;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;margin-bottom:4.0pt"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-ligatures:none;mso-fareast-language:EN-GB">
<img border="0" width="362" height="51" style="width:3.7708in;height:.5312in" id="Picture_x0020_1" src="cid:image001.png@01DC65F0.41F9AB30"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:ArialMT;color:red;mso-ligatures:none;mso-fareast-language:EN-GB">
</span><span style="font-size:8.0pt;font-family:ArialMT;color:#005C8A;mso-ligatures:none;mso-fareast-language:EN-GB"><a href="http://www.jwnc.gla.ac.uk/"><span style="color:#005C8A">www.JWNC.gla.ac.uk</span></a></span><span style="font-size:8.0pt;font-family:ArialMT;color:#EC2129;mso-ligatures:none;mso-fareast-language:EN-GB"><br>
</span><span style="mso-fareast-language:EN-GB"><img border="0" width="10" height="10" style="width:.1041in;height:.1041in" id="Picture_x0020_2" src="cid:image002.jpg@01DC65F0.41F9AB30"></span><span style="font-size:8.0pt;font-family:ArialMT;color:#EC2129;mso-ligatures:none;mso-fareast-language:EN-GB">
</span><span style="font-size:8.0pt;font-family:ArialMT;color:#005C8A;mso-ligatures:none;mso-fareast-language:EN-GB"><a href="LinkedIn.com/company/JWNC"><span style="color:#005C8A">LinkedIn.com/company/JWNC</span></a></span><span style="font-size:8.0pt;font-family:ArialMT;color:#EC2129;mso-ligatures:none;mso-fareast-language:EN-GB"><br>
</span><span style="mso-fareast-language:EN-GB"><img border="0" width="10" height="10" style="width:.1041in;height:.1041in" id="Picture_x0020_3" src="cid:image003.jpg@01DC65F0.41F9AB30"></span><span style="font-size:8.0pt;font-family:ArialMT;color:#EC2129;mso-ligatures:none;mso-fareast-language:EN-GB">
</span><span style="font-size:8.0pt;font-family:ArialMT;color:#005C8A;mso-ligatures:none;mso-fareast-language:EN-GB"><a href="https://twitter.com/uofg_jwnc"><span style="color:#005C8A">@UofG_JWNC</span></a></span><span style="mso-ligatures:none;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-GB"> </span><span style="mso-fareast-language:EN-GB"><o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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