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</o:shapelayout></xml><![endif]--></head><body lang=EN-US link="#0563C1" vlink="#954F72"><div class=WordSection1><p class=MsoNormal>Alex,<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>In our building we maintain 21C ( I believe) and 42% RH. Temp is +/-1C, RH +/-2%. Different processes are affected in different ways by these, so control is the only way to ensure consistent results. For example, photolith is very sensitive to RH, wet chemistry to temp.<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>We also move ~60000 cfm through the HEPAs.<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Regards,<o:p></o:p></p><div><p class=MsoNormal>Garry J. Bordonaro<o:p></o:p></p><p class=MsoNormal>Microlithographic Engineer<o:p></o:p></p><p class=MsoNormal>Cornell NanoScale Facility<o:p></o:p></p><p class=MsoNormal>250 Duffield Hall<o:p></o:p></p><p class=MsoNormal>343 Campus Road<o:p></o:p></p><p class=MsoNormal>Ithaca NY 14853-2700<o:p></o:p></p><p class=MsoNormal>(607) 254-4936<o:p></o:p></p><p class=MsoNormal><a href="mailto:bordonaro@cnf.cornell.edu"><span style='color:blue'>bordonaro@cnf.cornell.edu</span></a><o:p></o:p></p><p class=MsoNormal><a href="http://www.cnf.cornell.edu/"><span style='color:blue'>http://www.cnf.cornell.edu/</span></a><o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Please acknowledge CNF in your publications:<o:p></o:p></p><p class=MsoNormal>"This work was performed in part at the Cornell NanoScale Science & Technology Facility (CNF), a member of the National Nanotechnology Coordinated Infrastructure (NNCI), which is supported by the National Science Foundation (Grant NNCI-2025233)."<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><o:p> </o:p></p></div><p class=MsoNormal><o:p> </o:p></p><div><div style='border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in'><p class=MsoNormal><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> <b>On Behalf Of </b>Alex Dixon<br><b>Sent:</b> Wednesday, December 17, 2025 12:12 PM<br><b>To:</b> Lab Network <labnetwork@mtl.mit.edu><br><b>Subject:</b> [labnetwork] Cleanroom humidity<o:p></o:p></p></div></div><p class=MsoNormal><o:p> </o:p></p><div><p class=MsoNormal><span style='font-size:12.0pt;font-family:"Aptos",serif;color:black'>For those of you with climate controls in your cleanrooms, what relative humidity do your keep your cleanroom at, and how tightly do you control the fluccuations? How significant an effect have you seen on device performance? <o:p></o:p></span></p></div><div><p class=MsoNormal><span style='font-size:12.0pt;font-family:"Aptos",serif;color:black'><o:p> </o:p></span></p></div><div><p class=MsoNormal><span style='font-size:12.0pt;font-family:"Aptos",serif;color:black'>Our campus facilities is doing a climate control audit and asking any lab with special requirements to justify them. Any info you could share would be appreceated.<o:p></o:p></span></p></div><div><p class=MsoNormal><span style='font-size:12.0pt;font-family:"Aptos",serif;color:black'><o:p> </o:p></span></p></div><div><p class=MsoNormal><span style='font-size:12.0pt;font-family:"Aptos",serif;color:black'>Thanks!<o:p></o:p></span></p></div><div><p class=MsoNormal><span style='font-size:12.0pt;font-family:"Aptos",serif;color:black'>-Alex<o:p></o:p></span></p></div><div id=Signature><div><p class=MsoNormal><span style='font-size:12.0pt;font-family:"Aptos",serif;color:black'><o:p> </o:p></span></p></div><div><p class=MsoNormal><span style='font-size:10.5pt;font-family:"Segoe UI",sans-serif;color:#212121;background:white'>__________________________________________________________</span><span style='font-size:10.5pt;font-family:"Segoe UI",sans-serif;color:#212121'><o:p></o:p></span></p></div><div><p class=MsoNormal><span style='font-size:10.5pt;font-family:"Segoe UI",sans-serif;color:#212121'><o:p> </o:p></span></p></div><div><p class=MsoNormal><span style='font-size:10.5pt;font-family:"Segoe UI",sans-serif;color:#212121'><o:p> </o:p></span></p></div><div><p class=MsoNormal><span style='font-size:10.5pt;font-family:"Segoe UI",sans-serif;color:#212121;background:white'>Alex Dixon, Ph.D. (He/Him)</span><span style='font-size:10.5pt;font-family:"Segoe UI",sans-serif;color:#212121'><o:p></o:p></span></p></div><p class=MsoNormal style='background:white'><span style='font-size:10.5pt;font-family:"Segoe UI",sans-serif;color:#212121'>Lab Manager<o:p></o:p></span></p><p class=MsoNormal style='background:white'><span style='font-size:10.5pt;font-family:"Segoe UI",sans-serif;color:#212121'>Nanofabrication and Thin Film Deposition<o:p></o:p></span></p><p class=MsoNormal style='background:white'><span style='font-size:10.5pt;font-family:"Segoe UI",sans-serif;color:#212121;background:white'>Shared Instrument Facility </span><span style='font-size:10.5pt;font-family:"Segoe UI",sans-serif;color:#212121'><o:p></o:p></span></p><p class=MsoNormal style='background:white'><span style='font-size:10.5pt;font-family:"Segoe UI",sans-serif;color:#212121'>Colorado School of Mines<o:p></o:p></span></p><div><p class=MsoNormal><span style='font-size:12.0pt;color:black'><o:p> </o:p></span></p></div></div></div></body></html>