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Hi Alex,</div>
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Our main cleanroom is set to 21C +/- 1C in most areas and +/- 0.1C in Lithography. Humidity is 45 +/- 3% R.H.</div>
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Almost every process in the lab is affected by a failure to control either temperature or humidity. Temperature stability is crucial for our EBL users, and UV litho is strongly impacted if we can’t dehumidify in the summer and humidify in the winter. PVD
systems perform poorly in high humidity environments and static discharge can become an issue for devices in low humidity environments. I could go on, but I’ve spoken with a lot of users over the years who have learned the hard way about the impacts of poorly
controlled lab environments and are complimentary of the environmental controls we have in our facility.</div>
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Best,</div>
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-Nathan</div>
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<b>From: </b>labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Alex Dixon <agdixon@mines.edu><br>
<b>Date: </b>Wednesday, December 17, 2025 at 4:57 PM<br>
<b>To: </b>Lab Network <labnetwork@mtl.mit.edu><br>
<b>Subject: </b>[labnetwork] Cleanroom humidity<br>
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For those of you with climate controls in your cleanrooms, what relative humidity do your keep your cleanroom at, and how tightly do you control the fluccuations? How significant an effect have you seen on device performance? </div>
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Our campus facilities is doing a climate control audit and asking any lab with special requirements to justify them. Any info you could share would be appreceated.</div>
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Thanks!</div>
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-Alex</div>
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<span style="background-color: rgb(255, 255, 255);">Alex Dixon, Ph.D. (He/Him)</span></div>
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Lab Manager</div>
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Nanofabrication and Thin Film Deposition</div>
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<span style="background-color: rgb(255, 255, 255);">Shared Instrument Facility </span></div>
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Colorado School of Mines</div>
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