<div dir="ltr"><div><div class="gmail_default" style="font-family:arial,sans-serif">Alex,</div><div class="gmail_default" style="font-family:arial,sans-serif"><br></div><div class="gmail_default" style="font-family:arial,sans-serif">Here at the UofMichigan, we're looking for 43.5% +/- 1% in all of the "general" cleanroom spaces with a temperature of 68F, and in our submicron (ISO4/Class 10) we shoot for 43.5% +/- 0.5% and 68F.  Other than a couple of days in the spring, and fall, we can usually hit that target.</div><br clear="all"></div><div><div dir="ltr" class="gmail_signature" data-smartmail="gmail_signature"><div>Dennis<span class="gmail_default" style="font-family:arial,sans-serif"> Schweiger</span></div><div><span class="gmail_default" style="font-family:arial,sans-serif">University of Michigan/LNF</span></div><div><span class="gmail_default" style="font-family:arial,sans-serif">Facilities</span></div><div> </div><div>734.647.2055 Ofc</div></div></div></div><br><div class="gmail_quote gmail_quote_container"><div dir="ltr" class="gmail_attr">On Wed, Dec 17, 2025 at 5:03 PM Alex Dixon <<a href="mailto:agdixon@mines.edu">agdixon@mines.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex"><div class="msg3277275254466717753">




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For those of you with climate controls in your cleanrooms, what relative humidity do your keep your cleanroom at, and how tightly do you control the fluccuations?  How significant an effect have you seen on device performance? </div>
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Our campus facilities is doing a climate control audit and asking any lab with special requirements to justify them. Any info you could share would be appreceated.</div>
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Thanks!</div>
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-Alex</div>
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<span style="background-color:rgb(255,255,255)">Alex Dixon, Ph.D. (He/Him)</span></div>
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Lab Manager</div>
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Nanofabrication and Thin Film Deposition</div>
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<span style="background-color:rgb(255,255,255)">Shared Instrument Facility </span></div>
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Colorado School of Mines</div>
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