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We aim for 50%. Above 60% we clearly see adhesion problems with resist. Below 35% ESD charging is difficult to avoid.</div>
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In case you are doing DUV exposure, humidity control is even more important. Small variations can affect your exposure times. </div>
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<span style="color: rgb(31, 73, 125);">Best regards, Met vriendelijke groet,</span></p>
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<span style="color: rgb(31, 73, 125);"> </span></p>
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<span style="font-family: Arial, sans-serif; color: rgb(214, 2, 154);"><b>Marc Zuiddam</b></span><span style="font-family: Arial, sans-serif; font-size: 10pt; color: rgb(0, 121, 172);"> </span><span style="font-family: Arial, sans-serif; color: black;"><b>| Operations
manager Kavli nanolab</b></span></p>
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<span style="font-family: Arial, sans-serif; font-size: 10pt; color: rgb(214, 2, 154);"><b>a:
</b></span><span style="font-family: Arial, sans-serif; font-size: 10pt; color: black;">Delft University of Technology</span><span style="font-family: Arial, sans-serif; font-size: 10pt; color: rgb(68, 68, 68);"> </span><span style="font-family: Arial, sans-serif; font-size: 10pt; color: black;">| Lorentzweg
1</span><span style="font-family: Arial, sans-serif; font-size: 10pt; color: rgb(68, 68, 68);"> </span><span style="font-family: Arial, sans-serif; font-size: 10pt; color: black;">| 2628 CJ Delft</span><span style="font-family: Arial, sans-serif; font-size: 10pt; color: rgb(68, 68, 68);"><br>
</span><span style="font-family: Arial, sans-serif; font-size: 10pt; color: rgb(214, 2, 154);"><b>e:</b></span><span style="font-family: Arial, sans-serif; font-size: 10pt; color: black;"> </span><span style="font-family: Arial, sans-serif; font-size: 10pt; color: blue;"><a style="color: blue; margin-top: 0px; margin-bottom: 0px;" class="OWAAutoLink" id="OWAbeff557f-2266-82cc-814d-0d2bae4e16c0" href="mailto:M.R.Zuiddam@tudelft.nl">M.R.Zuiddam@tudelft.nl</a></span><span style="font-family: Arial, sans-serif; font-size: 10pt; color: rgb(68, 68, 68);"> |
</span><span style="font-family: Arial, sans-serif; font-size: 10pt; color: rgb(214, 2, 154);"><b>w:</b></span><span style="font-family: Arial, sans-serif; font-size: 10pt; color: black;"><a style="color: black; margin-top: 0px; margin-bottom: 0px;" class="OWAAutoLink" id="OWA8c80c37d-5609-efb7-efab-7bbcb483b5ca" target="_blank" href="http://kavli.tudelft.nl/"> kavli.tudelft.nl</a></span><span style="font-family: Arial, sans-serif; font-size: 10pt; color: rgb(68, 68, 68);"><br>
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<span style="color: rgb(31, 73, 125);"> </span></p>
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<span style="font-family: Arial, sans-serif; font-size: 10pt; color: rgb(68, 68, 68);"><img style="width: 1.091in; height: 0.283in; margin-top: 0px; margin-bottom: 0px;" height="27" width="104" alt="Logo" data-outlook-trace="F:1|T:1" src="cid:e0ef2504-24fe-4925-89e6-fb4029c03eac"></span></p>
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<b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Peder Lenvik <plenvik@ucsb.edu><br>
<b>Sent:</b> Wednesday, December 17, 2025 23:06<br>
<b>To:</b> Alex Dixon <agdixon@mines.edu><br>
<b>Cc:</b> Lab Network <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> Re: [labnetwork] Cleanroom humidity </div>
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<span style="letter-spacing: revert; background-color: revert; line-height: revert;">You don't often get email from plenvik@ucsb.edu.
<a style="color: revert; display: revert; background-color: revert;" data-auth="NotApplicable" class="OWAAutoLink" id="OWA92fdb599-373f-a815-25c7-3896617c6025" href="https://aka.ms/LearnAboutSenderIdentification">
Learn why this is important</a></span></div>
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<div style="direction: ltr;">For ESD control </div>
<div style="direction: ltr;">Some processes are affected by humidity </div>
<div style="direction: ltr;">Those processes should specify what the level should be.<br>
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<div style="direction: ltr;">Peder Lenvik<br>
<br>
Sr. Facilities Lead<br>
<br>
Electrical and Computer Engineering<br>
E.S.B. Bldg. #225, Room 1109F<br>
University California Santa Barbara, Santa Barbara, Ca. 93106</div>
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<div style="direction: ltr;">On Wed, Dec 17, 2025 at 14:04 Peder Lenvik <<a class="OWAAutoLink" id="OWA9c73960e-45e3-97c2-0049-67c89d27d9b1" href="mailto:plenvik@ucsb.edu">plenvik@ucsb.edu</a>> wrote:</div>
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<div style="direction: ltr;">40 to 60</div>
<div style="direction: ltr;">Or 50 +/- 10<br>
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<div style="direction: ltr;">Peder Lenvik<br>
<br>
Sr. Facilities Lead<br>
<br>
Electrical and Computer Engineering<br>
E.S.B. Bldg. #225, Room 1109F<br>
University California Santa Barbara, Santa Barbara, Ca. 93106</div>
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<div style="direction: ltr;">On Wed, Dec 17, 2025 at 14:03 Alex Dixon <<a class="OWAAutoLink" id="OWA2c82d9c0-4329-f8fc-d85b-84fe0ac772b3" href="mailto:agdixon@mines.edu">agdixon@mines.edu</a>> wrote:</div>
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For those of you with climate controls in your cleanrooms, what relative humidity do your keep your cleanroom at, and how tightly do you control the fluccuations? How significant an effect have you seen on device performance? </div>
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Our campus facilities is doing a climate control audit and asking any lab with special requirements to justify them. Any info you could share would be appreceated.</div>
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Thanks!</div>
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-Alex</div>
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<span style="background-color: rgb(255, 255, 255);">__________________________________________________________</span></div>
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<span style="background-color: rgb(255, 255, 255);">Alex Dixon, Ph.D. (He/Him)</span></div>
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Lab Manager</div>
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Nanofabrication and Thin Film Deposition</div>
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<span style="background-color: rgb(255, 255, 255);">Shared Instrument Facility </span></div>
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Colorado School of Mines</div>
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