<div dir="ltr"><div class="gmail_default" style="color:#0b5394">Hi Alex,</div><div class="gmail_default" style="color:#0b5394"><br></div><div class="gmail_default" style="color:#0b5394">We have fairly tight control on our systems.  Temperature is 68F +/- 0.5F and humidity is 40% +/- 2%.  </div><div class="gmail_default" style="color:#0b5394"><br></div><div class="gmail_default" style="color:#0b5394">A lot of literature will cite that cleanrooms should be maintained between 30% and 50% humidity.  The higher end of that range (45% - 50%) is preferred for photolithography.  The lower end is preferred for other applications, although, as others have pointed out, the most important thing is to keep temperature and humidity stable to avoid process shifts.  We do not have the ability to independently control humidity in different zones, so have compromised towards the middle at 40%.</div><div class="gmail_default" style="color:#0b5394"><a class="gmail_plusreply"><br></a></div><div class="gmail_default" style="color:#0b5394">Best Regards,</div><div class="gmail_default" style="color:#0b5394"><br>Matt</div><div class="gmail_default" style="color:#0b5394"><a class="gmail_plusreply"><br></a></div></div><br><div class="gmail_quote gmail_quote_container"><div dir="ltr" class="gmail_attr">On Wed, Dec 17, 2025 at 9:56 PM Alex Dixon <<a href="mailto:agdixon@mines.edu">agdixon@mines.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex"><div class="msg-2988684212662963336">




<div dir="ltr">
<div style="font-family:Aptos,Aptos_EmbeddedFont,Aptos_MSFontService,Calibri,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0)">
For those of you with climate controls in your cleanrooms, what relative humidity do your keep your cleanroom at, and how tightly do you control the fluccuations?  How significant an effect have you seen on device performance? </div>
<div style="font-family:Aptos,Aptos_EmbeddedFont,Aptos_MSFontService,Calibri,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0)">
<br>
</div>
<div style="font-family:Aptos,Aptos_EmbeddedFont,Aptos_MSFontService,Calibri,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0)">
Our campus facilities is doing a climate control audit and asking any lab with special requirements to justify them. Any info you could share would be appreceated.</div>
<div style="font-family:Aptos,Aptos_EmbeddedFont,Aptos_MSFontService,Calibri,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0)">
<br>
</div>
<div style="font-family:Aptos,Aptos_EmbeddedFont,Aptos_MSFontService,Calibri,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0)">
Thanks!</div>
<div style="font-family:Aptos,Aptos_EmbeddedFont,Aptos_MSFontService,Calibri,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0)">
-Alex</div>
<div id="m_-2988684212662963336Signature">
<div style="font-family:Aptos,Aptos_EmbeddedFont,Aptos_MSFontService,Calibri,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0)">
<br>
</div>
<div style="font-size:14px;color:rgb(33,33,33)">
<span style="background-color:rgb(255,255,255)">__________________________________________________________</span></div>
<div style="font-size:14px;color:rgb(33,33,33)">
<span style="background-color:rgb(255,255,255)"><br>
</span></div>
<div style="font-size:14px;color:rgb(33,33,33)">
<span style="background-color:rgb(255,255,255)"><br>
</span></div>
<div style="font-size:14px;color:rgb(33,33,33)">
<span style="background-color:rgb(255,255,255)">Alex Dixon, Ph.D. (He/Him)</span></div>
<div style="direction:ltr;text-align:left;background-color:rgb(255,255,255);margin:0px;font-size:14px;color:rgb(33,33,33)">
Lab Manager</div>
<div style="direction:ltr;text-align:left;background-color:rgb(255,255,255);margin:0px;font-size:14px;color:rgb(33,33,33)">
Nanofabrication and Thin Film Deposition</div>
<div style="direction:ltr;text-align:left;background-color:rgb(255,255,255);margin:0px;font-size:14px;color:rgb(33,33,33)">
<span style="background-color:rgb(255,255,255)">Shared Instrument Facility </span></div>
<div style="direction:ltr;text-align:left;background-color:rgb(255,255,255);margin:0px;font-size:14px;color:rgb(33,33,33)">
Colorado School of Mines</div>
<div style="font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0)">
<br>
</div>
</div>
</div>

_______________________________________________<br>
labnetwork mailing list<br>
<a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<a href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork" rel="noreferrer" target="_blank">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><br>
</div></blockquote></div><div><br clear="all"></div><div><br></div><span class="gmail_signature_prefix">-- </span><br><div dir="ltr" class="gmail_signature"><div dir="ltr"><p class="MsoNormal">--<br>
Matthew T. Moneck, Ph.D<br>
Executive Director, Claire & John Bertucci Nanotechnology Laboratory<br>
Electrical & Computer Engineering | Carnegie Mellon University<br>
5000 Forbes Avenue, Pittsburgh, PA 15213-3890<br>
Phone: 412-268-5430<br>
<a href="http://ece.cmu.edu" target="_blank">ece.cmu.edu</a> <br>
<a href="http://nanofab.ece.cmu.edu" target="_blank">nanofab.ece.cmu.edu</a> </p></div></div>