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.shape {behavior:url(#default#VML);}
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/* Font Definitions */
@font-face
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{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
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@font-face
{font-family:"Segoe UI";
panose-1:2 11 5 2 4 2 4 2 2 3;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
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font-size:12.0pt;
font-family:"Aptos",sans-serif;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:#467886;
text-decoration:underline;}
span.EmailStyle21
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font-family:"Aptos",sans-serif;
color:windowtext;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;
mso-ligatures:none;}
@page WordSection1
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margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
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<p class="MsoNormal">Hi All<o:p></o:p></p>
<p class="MsoNormal">We here at Draper Laboratory keep out clean rooms at 68 +/- 3 F, humidity 45 +/- 2, with steppers and photo aligners<o:p></o:p></p>
<p class="MsoNormal">Thanks<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><b><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black;letter-spacing:.9pt;background:white">Mark April </span></b><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black;letter-spacing:.9pt;background:white">|
Microfabrication Senior Equipment Engineer| Draper</span><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black;letter-spacing:.9pt"><br>
<span style="background:white">555 Technology Square| Cambridge, MA 02139-3563</span><br>
<span style="background:white">Office: 617-258-1613<o:p></o:p></span></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black;letter-spacing:.9pt;background:white">Cell: 617-455-1596<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black;letter-spacing:.9pt;background:white"><a href="mailto:mapril@draper.com"><span style="color:#0563C1">mapril@draper.com</span></a><br>
</span><span style="font-size:11.0pt"><a href="http://www.draper.com/" target="_blank"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#000099;letter-spacing:.9pt;background:white">www.draper.com</span></a></span><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black;letter-spacing:.9pt"><o:p></o:p></span></p>
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<p class="MsoNormal"><a name="_____replyseparator"></a><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Paolini, Steven<br>
<b>Sent:</b> Wednesday, December 17, 2025 7:22 PM<br>
<b>To:</b> Alex Dixon <agdixon@mines.edu>; Lab Network <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [EXTERNAL] Re: [labnetwork] Cleanroom humidity<o:p></o:p></span></p>
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<b><u><span style="font-size:18.0pt;color:black">WARNING: External Email Alert</span></u></b><o:p></o:p></p>
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<strong><span style="font-family:"Aptos",sans-serif;color:black">This email has been sent from outside of the Draper network.</span></strong><o:p></o:p></p>
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<span style="font-size:10.5pt;color:black">Please treat the email with caution, especially if you are requested to click on a link, decrypt/open an attachment, or enable macros. For further information on how to spot phishing, access "Phishing Awareness Policy"
on the Draper Portal and report phishing by clicking the "Report Suspicious" button on the Outlook toolbar</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="color:black">We have multiple photo tools, including EBL and a stepper that are sensitive to changes in RH. What's most important, aside from the actual value, is consistency. if your RH is not consistent, it will affect the
photo speed. Here at Harvard CNS, we maintain 52% +_ 2 which is relatively easy to maintain and comfortable for our occupants.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Steve Paolini (Equipment Dood)<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black"> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>>
on behalf of Alex Dixon <<a href="mailto:agdixon@mines.edu">agdixon@mines.edu</a>><br>
<b>Sent:</b> Wednesday, December 17, 2025 1:12 PM<br>
<b>To:</b> Lab Network <<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>><br>
<b>Subject:</b> [labnetwork] Cleanroom humidity<o:p></o:p></span></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal"><span style="color:black">For those of you with climate controls in your cleanrooms, what relative humidity do your keep your cleanroom at, and how tightly do you control the fluccuations? How significant an effect have you seen on device
performance? <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Our campus facilities is doing a climate control audit and asking any lab with special requirements to justify them. Any info you could share would be appreceated.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Thanks!<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">-Alex<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Segoe UI",sans-serif;color:#212121;background:white">__________________________________________________________</span><span style="font-size:10.5pt;font-family:"Segoe UI",sans-serif;color:#212121"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Segoe UI",sans-serif;color:#212121"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Segoe UI",sans-serif;color:#212121;background:white">Alex Dixon, Ph.D. (He/Him)</span><span style="font-size:10.5pt;font-family:"Segoe UI",sans-serif;color:#212121"><o:p></o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-size:10.5pt;font-family:"Segoe UI",sans-serif;color:#212121">Lab Manager<o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="font-size:10.5pt;font-family:"Segoe UI",sans-serif;color:#212121">Nanofabrication and Thin Film Deposition<o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="font-size:10.5pt;font-family:"Segoe UI",sans-serif;color:#212121;background:white">Shared Instrument Facility </span><span style="font-size:10.5pt;font-family:"Segoe UI",sans-serif;color:#212121"><o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="font-size:10.5pt;font-family:"Segoe UI",sans-serif;color:#212121">Colorado School of Mines<o:p></o:p></span></p>
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