<div dir="ltr"><div><p><strong>Dear Lenvik,</strong></p>
<p>Cleanroom humidity requirements are defined based on the <strong>process sensitivity, installed equipment, and room volume</strong>.<br>
The presence of <strong>ovens or other heat-generating equipment</strong> can significantly influence both <strong>thermal load and relative humidity</strong>, and therefore must be taken into account during <strong>HVAC system design, balancing, and operation</strong>.</p>
<p>From a general cleanroom engineering perspective, <strong>ISO Class 5 (Class 100) and ISO Class 6 (Class 1,000)</strong> cleanrooms are typically operated at a <strong>relative humidity setpoint of 45% ± 5%</strong>, unless process-specific constraints require otherwise.</p>
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</div></div></div><br></div><br><div class="gmail_quote gmail_quote_container"><div dir="ltr" class="gmail_attr">Peder Lenvik <<a href="mailto:plenvik@ucsb.edu">plenvik@ucsb.edu</a>>, 18 Ara 2025 Per, 16:19 tarihinde şunu yazdı:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex"><div dir="auto">For ESD control </div><div dir="auto">Some processes are affected by humidity </div><div dir="auto">Those processes should specify what the level should be.<br clear="all"><br clear="all"><div dir="auto"><div dir="ltr" class="gmail_signature">Peder Lenvik<br> <br>Sr. Facilities Lead<br> <br>Electrical and Computer Engineering<br>E.S.B. Bldg. #225, Room 1109F<br>University California Santa Barbara, Santa Barbara, Ca. 93106<br></div></div></div><div><br></div><div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Wed, Dec 17, 2025 at 14:04 Peder Lenvik <<a href="mailto:plenvik@ucsb.edu" target="_blank">plenvik@ucsb.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex"><div dir="auto">40 to 60</div><div dir="auto">Or 50 +/- 10<br clear="all"><br clear="all"><div dir="auto"><div dir="ltr" class="gmail_signature">Peder Lenvik<br> <br>Sr. Facilities Lead<br> <br>Electrical and Computer Engineering<br>E.S.B. Bldg. #225, Room 1109F<br>University California Santa Barbara, Santa Barbara, Ca. 93106<br></div></div></div><div><br></div><div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Wed, Dec 17, 2025 at 14:03 Alex Dixon <<a href="mailto:agdixon@mines.edu" target="_blank">agdixon@mines.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex">
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For those of you with climate controls in your cleanrooms, what relative humidity do your keep your cleanroom at, and how tightly do you control the fluccuations? How significant an effect have you seen on device performance? </div>
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Our campus facilities is doing a climate control audit and asking any lab with special requirements to justify them. Any info you could share would be appreceated.</div>
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Thanks!</div>
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-Alex</div>
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