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Cleanroom humidity should be maintained at 45% +/- 5%, temperature should be 68F +/- 1F. Ideally, the temperature/humidity level in Cleanroom should not fluctuate over time. </div>
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The cleanroom tools/capabilities can start having issues if the temperature & humidity drift out of spec:</div>
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(i) Optical lithography could suffer from temperature fluctuation, e.g. patterns on the wafers/masks can shrink/expand due to thermal expansion, leading to alignment issues</div>
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(ii) Too much moisture in the cleanroom air could lead to resist adhesion problem, too little moisture in the cleanroom air could lead to ESD problem.</div>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Peder Lenvik <plenvik@ucsb.edu><br>
<b>Sent:</b> Wednesday, December 17, 2025 5:04 PM<br>
<b>To:</b> Alex Dixon <agdixon@mines.edu><br>
<b>Cc:</b> Lab Network <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> Re: [labnetwork] Cleanroom humidity</font>
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<div dir="auto">40 to 60</div>
<div dir="auto">Or 50 +/- 10<br clear="all">
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<div dir="ltr" class="x_gmail_signature" data-smartmail="gmail_signature">Peder Lenvik<br>
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Sr. Facilities Lead<br>
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Electrical and Computer Engineering<br>
E.S.B. Bldg. #225, Room 1109F<br>
University California Santa Barbara, Santa Barbara, Ca. 93106<br>
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<div dir="ltr" class="x_gmail_attr">On Wed, Dec 17, 2025 at 14:03 Alex Dixon <<a href="mailto:agdixon@mines.edu">agdixon@mines.edu</a>> wrote:<br>
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For those of you with climate controls in your cleanrooms, what relative humidity do your keep your cleanroom at, and how tightly do you control the fluccuations? How significant an effect have you seen on device performance? </div>
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Our campus facilities is doing a climate control audit and asking any lab with special requirements to justify them. Any info you could share would be appreceated.</div>
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Thanks!</div>
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-Alex</div>
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<span style="background-color:rgb(255,255,255)">__________________________________________________________</span></div>
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<span style="background-color:rgb(255,255,255)">Alex Dixon, Ph.D. (He/Him)</span></div>
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Lab Manager</div>
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Nanofabrication and Thin Film Deposition</div>
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<span style="background-color:rgb(255,255,255)">Shared Instrument Facility </span></div>
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Colorado School of Mines</div>
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