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</w:WordDocument>
</xml><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
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panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:Aptos;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
font-size:12.0pt;
font-family:"Aptos",sans-serif;}
span.EmailStyle18
{mso-style-type:personal-reply;
font-family:"Aptos",sans-serif;
color:windowtext;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;
mso-ligatures:none;}
@page WordSection1
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margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
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--></style>
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<p class="MsoNormal">IMHO - The only reason to put it in the yellow area is if you expect to run ammonia image reversal process in the same setup (that was one of things people did with YES HMDS ovens). Strictly HMDS process should be illumination agnostic.
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<p class="MsoNormal">But…. you may expect requests for image reversal after all, and having no NH3 plumbing isn’t a show-stopper..
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Mike<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="mso-ligatures:standardcontextual"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="mso-ligatures:standardcontextual">_______________________________________________<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-ligatures:standardcontextual">Michael Yakimov<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-ligatures:standardcontextual">Research scientist<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-ligatures:standardcontextual">Department of Nanoscale Science and Engineering<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-ligatures:standardcontextual">University at Albany - State University of NY<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-ligatures:standardcontextual"> <o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-ligatures:standardcontextual">253 Fuller rd.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-ligatures:standardcontextual">Albany NY 12203<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-ligatures:standardcontextual"> <o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-ligatures:standardcontextual">Phone: 518-437-8609 lab<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-ligatures:standardcontextual">e-mail: <a href="mailto:myakimov@albany.edu">
<span style="color:#467886">myakimov@albany.edu</span></a><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Johnson, Michael W<br>
<b>Sent:</b> Wednesday, January 21, 2026 11:15<br>
<b>To:</b> Network Fab <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] HMDS oven<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Simple question:<o:p></o:p></p>
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<p class="MsoNormal">Is it necessary to locate an HMDS oven in an amber light space as part of a lithography tool set? Could it not be located in a white light area directly adjacent an amber light space?<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">-Michael.<o:p></o:p></p>
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