<html><head><meta http-equiv="Content-Type" content="text/html; charset=UTF-8"></head><body dir="auto"><div dir="auto"> Vapor priming can be done in white light as no photosensitve material is involved. </div><div dir="auto"><br></div><div dir="auto"><br></div><div dir="auto"><br></div><div id="composer_signature" dir="auto"><meta http-equiv="Content-Type" content="text/html; charset=UTF-8"><div style="font-size:85%;color:#575757" dir="auto"><p class="MsoNormal">Garry J. Bordonaro</p>
<p class="MsoNormal">Microlithographic Engineer</p>
<p class="MsoNormal">Cornell NanoScale Facility</p>
<p class="MsoNormal">250 Duffield Hall</p>
<p class="MsoNormal"><a>343 Campus Road</a></p><a>
</a><p class="MsoNormal"><a>Ithaca NY 14853-2700</a></p><p class="MsoNormal"><a href="tel:(607) 254-4936" style="font-size: 85%;">(607) 254-4936</a></p>
<p class="MsoNormal"><a style="height: auto;" href="mailto:bordonaro@cnf.cornell.edu"><span style="color: blue;">bordonaro@cnf.cornell.edu</span></a></p>
<p class="MsoNormal"><a style="height: auto;" href="http://www.cnf.cornell.edu/"><span style="color: blue;">http://www.cnf.cornell.edu/</span></a></p></div><div style="font-size:85%;color:#575757" dir="auto"><br></div><div style="font-size:85%;color:#575757" dir="auto">Sent from my Verizon, Samsung Galaxy smartphone</div></div><div dir="auto"><br></div><div><br></div><div align="left" dir="auto" style="font-size:100%;color:#000000"><div>-------- Original message --------</div><div>From: "Johnson, Michael W" <mjohnso6@tulane.edu> </div><div>Date: 1/21/26 6:31 PM (GMT-05:00) </div><div>To: Network Fab <labnetwork@mtl.mit.edu> </div><div>Subject: [labnetwork] HMDS oven </div><div><br></div></div>
<div>Simple question:</div>
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<div>Is it necessary to locate an HMDS oven in an amber light space as part of a lithography tool set? Could it not be located in a white light area directly adjacent an amber light space?</div>
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<div>-Michael.</div>
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