<div dir="ltr"><div dir="ltr"><div>Hi Michael,</div><div><br></div><div>I see no need for this unless you have some kind of particle concern transporting substrates between the oven and your litho area. </div><div>Our HMDS oven is in a separate bay from our photoresist track.</div><div><br></div><div>Thanks,</div><div>Hope</div></div><br><div class="gmail_quote gmail_quote_container"><div dir="ltr" class="gmail_attr">On Wed, Jan 21, 2026 at 3:29 PM Johnson, Michael W <<a href="mailto:mjohnso6@tulane.edu">mjohnso6@tulane.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex">



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<div>Simple question:</div>
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<div>Is it necessary to locate an HMDS oven in an amber light space as part of a lithography tool set? Could it not be located in a white light area directly adjacent an amber light space?</div>
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<div>-Michael.</div>
</div>

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</blockquote></div><div><br clear="all"></div><br><span class="gmail_signature_prefix">-- </span><br><div dir="ltr" class="gmail_signature"><div dir="ltr"><div><b><span style="font-family:georgia,serif">All the best,</span></b></div><div><span style="font-family:georgia,serif"><br></span></div><div><span style="font-family:georgia,serif">Hope Fa-Kaji</span></div><div><span style="font-family:georgia,serif;color:rgb(102,102,102)">Semiconductor Equipment Engineer</span></div><div><span style="font-family:georgia,serif;color:rgb(102,102,102)">MicroSystems Laboratory</span></div><div><span style="font-family:georgia,serif;color:rgb(102,102,102)"><img width="420" height="95" src="https://ci3.googleusercontent.com/mail-sig/AIorK4yBx1QCkq_DPrtgR5B_lqZ1t-Y52u9Nq4qfhFi5qkDXBdbcb8OmcM5Is87_HYBHrwehwut24-Put5a8"><br></span></div><div><span style="font-family:georgia,serif"></span></div><div></div></div></div></div>