<div dir="auto">We have an SPTS - very few issues and works well as far as I know. </div><div dir="auto"><div style="font-size:inherit"><a href="https://wiki.nanofab.ucsb.edu/wiki/Vapor_HF_Etch" style="font-size:inherit">https://wiki.nanofab.ucsb.edu/wiki/Vapor_HF_Etch</a></div>One user had a particulate issue with it, which they eventually fixed by placing a “cover” wafers on stand-offs over their product wafers, which “catches” the particles. </div><div dir="auto"><br></div><div dir="auto">I don’t know how it compares with the others you mentioned. <br clear="all"><br clear="all"><div dir="auto"><div dir="ltr" class="gmail_signature" data-smartmail="gmail_signature"><div dir="ltr"><font face="georgia, serif" size="4" style="font-family:georgia,serif;color:rgb(0,0,0)">-- Demis </font><font face="georgia, serif" size="1" style="font-family:georgia,serif;color:rgb(0,0,0)">(<a href="https://wiki.nanotech.ucsb.edu/wiki/Demis_D._John" target="_blank" style="font-family:georgia,serif">contact info</a>)</font><div><i style="font-family:"times new roman",serif">Reminder</i><span style="font-family:"times new roman",serif">: The NanoFab has a </span><a href="https://wiki.nanotech.ucsb.edu/wiki/Frequently_Asked_Questions#Publications_acknowledging_the_Nanofab" style="font-family:"times new roman",serif" target="_blank">publications policy</a><font face="georgia, serif" size="4" style="font-family:georgia,serif;color:rgb(0,0,0)"><br></font></div></div></div></div></div><div><br></div><div><br><div class="gmail_quote gmail_quote_container"><div dir="ltr" class="gmail_attr">On Fri, Jan 23, 2026 at 05:56 Beaudoin, Mario <<a href="mailto:beaudoin@physics.ubc.ca">beaudoin@physics.ubc.ca</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left-width:1px;border-left-style:solid;padding-left:1ex;border-left-color:rgb(204,204,204)"><u></u>
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<p>Dear Network,</p>
<p>We are looking into purchasing an HF vapor etching system. We've
looked at Memstar, AMMT and idonus systems. We would be grateful
for any recommendation/appreciation. </p>
<p>For something you may not wish to share with the entire network,
I would very much appreciate a private message.</p>
<p>Regards,</p>
<p>Mario</p></div><div>
<div>-- <br>
<img src="cid:ii_19beb71fc7ffc79261e1" border="0" style="width:340px;max-width:100%"></div>
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