<html>
<head>
<meta http-equiv="Content-Type" content="text/html; charset=iso-8859-1">
<style type="text/css" style="display:none;"> P {margin-top:0;margin-bottom:0;} </style>
</head>
<body dir="ltr">
<div style="font-family: Aptos, "Aptos_EmbeddedFont", "Aptos_MSFontService", Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
Hello everyone, </div>
<div style="font-family: Aptos, "Aptos_EmbeddedFont", "Aptos_MSFontService", Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
We are having a heck of a time depositing SnO2 in our ALD onto bare (with native oxide) silicon at a substrate temperature of 100 to 200C. This is our first time attempting this material in our Beneq TFS200. We are using TDMASn + H2O as precursors. We
have tried heating the TDMASn anywhere between 50 to 100C, using headspace loading and via the material's vapor pressure. We have looked at TDMASn pulse times from 200ms to 1.4 seconds with dwell times of 1 to 3 seconds. Water vapor is pulsed at our usual
100ms and a purge of 3 seconds. </div>
<div style="font-family: Aptos, "Aptos_EmbeddedFont", "Aptos_MSFontService", Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
So here's a couple of questions: 1. I have read anecdotally that the material will decompose above 60C. Do you have any experience with this? 2. While the line between our heated bubbler and the reactor is quite short, it is not heated. Do your tools depositing
tin oxide require a heated line to the reactor? </div>
<div class="elementToProof" id="Signature">
<div style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
Any advice would be fantastic. </div>
<div class="elementToProof" id="divtagdefaultwrapper">
<p class="elementToProof" style="direction: ltr; margin-top: 0px; margin-bottom: 0px;">
<span style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">Regards,</span></p>
<p class="elementToProof" style="direction: ltr; margin-top: 0px; margin-bottom: 0px;">
<span style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);"> Michael </span></p>
<p class="elementToProof" style="direction: ltr; margin-top: 0px; margin-bottom: 0px;">
<span style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);"><br>
</span></p>
<p class="elementToProof" style="direction: ltr; margin-top: 0px; margin-bottom: 0px;">
<span style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">Engineering Senior Researcher </span></p>
<p class="elementToProof" style="direction: ltr; margin-top: 0px; margin-bottom: 0px;">
<span style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">Micro/Nano Technology Center</span></p>
<p class="elementToProof" style="direction: ltr; margin-top: 0px; margin-bottom: 0px;">
<span style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);"><b><br>
</b></span></p>
</div>
</div>
</body>
</html>