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Hi all,</div>
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I have a user inquiring about etching a bismuth substrate, and we don't have any readily available recipes on our tools. Does anyone have experience dry etching Bi? I was thinking a recipe with CH4 and Ar given that trimethyl-bismuth has a low boiling point.
I don't have any Bi substrates to practice on, otherwise I'd try out some etch chemistries on my own.</div>
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If anybody has any recipes that they are willing to share, I would be very grateful! Etching would be done in a SAMCO 230ip (ICP+bias) or a Plasmatherm 210RL (parallel plate RIE).</div>
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Best,</div>
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<span style="font-size: 14pt;">Cody Corey </span><span style="font-size: 10pt; color: rgb(153, 153, 153);">(He/Him)</span></div>
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<i>Research Specialist</i></div>
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MIT.nano</div>
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32 Vassar St. Cambridge, MA 02139</div>
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12-4011</div>
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ccorey24@mit.edu</div>
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Cell: 860-576-3230</div>
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