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Hi Cody,</div>
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You may try CH4/H2/Ar plasma, see the following papers for your reference:</div>
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1. <span class="elementToProof"><a class="OWAAutoLink" id="OWAe1da7851-df3b-7f1e-c8b7-30104e37b7dd" href="https://www.sciencedirect.com/science/article/pii/S016943321401928X#:~:text=Experimental,pressure%20and%20gas%20flow%20rate.">https://www.sciencedirect.com/science/article/pii/S016943321401928X#:~:text=Experimental,pressure%20and%20gas%20flow%20rate.</a></span></div>
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<span class="elementToProof">2. <a href="https://apps.dtic.mil/sti/tr/pdf/ADA475544.pdf">
https://apps.dtic.mil/sti/tr/pdf/ADA475544.pdf</a></span></div>
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<span class="elementToProof">Best,</span></div>
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<span class="elementToProof">Yong Sun</span></div>
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<b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Cody Corey <ccorey24@mit.edu><br>
<b>Sent:</b> Thursday, February 12, 2026 4:28 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] Bismuth Dry Etch Recipes</div>
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Hi all,</div>
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I have a user inquiring about etching a bismuth substrate, and we don't have any readily available recipes on our tools. Does anyone have experience dry etching Bi? I was thinking a recipe with CH4 and Ar given that trimethyl-bismuth has a low boiling point.
I don't have any Bi substrates to practice on, otherwise I'd try out some etch chemistries on my own.</div>
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If anybody has any recipes that they are willing to share, I would be very grateful! Etching would be done in a SAMCO 230ip (ICP+bias) or a Plasmatherm 210RL (parallel plate RIE).</div>
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Best,</div>
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<span style="font-size: 14pt;">Cody Corey </span><span style="font-size: 10pt; color: rgb(153, 153, 153);">(He/Him)</span></div>
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<i>Research Specialist</i></div>
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MIT.nano</div>
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32 Vassar St. Cambridge, MA 02139</div>
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12-4011</div>
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ccorey24@mit.edu</div>
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Cell: 860-576-3230</div>
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