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Vendors need to cover themselves to avoid "but your datasheet said.....". Generally, the Spin Curves for Mean thickness targeting work for most spin coaters and can be used for trouble shooting, (i.e. 4000 RPM +/- 50RPM dry time worked for a given target for
months and then all of sudden it takes 2500RPM to achieve the same thickness.) I do like the inputs of a control Ramp down after the 95C Time at temp to prevent cracking and the surface stickiness check. I A little off topic </div>
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Phil </div>
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<p style="line-height: 1.38; margin: 0in 0in 8pt;" class="elementToProof"><span style="font-family: Aptos, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);"><b>Thank you,</b></span></p>
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<b>Phillip Bauer </b></div>
<p style="line-height: 1.38; margin: 0in 0in 8pt;" class="elementToProof"><span style="font-family: Aptos, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">Principal Photolithography Process Engineer</span></p>
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4350 Innovation Drive</div>
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Farmers Branch, Texas 75244</div>
<p style="line-height: 1.38; margin: 0in 0in 8pt;" class="elementToProof"><span style="font-family: Aptos, sans-serif; font-size: 12pt; color: rgb(70, 120, 134);"><u><a style="color: rgb(70, 120, 134); margin-top: 0px; margin-bottom: 0px;" href="mailto:phillip.bauer@formfactor.com">phillip.bauer@formfactor.com</a></u></span></p>
<p style="line-height: 1.38; margin: 0in 0in 8pt;" class="elementToProof"><span style="font-family: Aptos, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">M: 682 521 0874</span></p>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> Jasper Nijdam <ajn5@georgetown.edu> on behalf of Jasper Nijdam <Jasper.Nijdam@georgetown.edu><br>
<b>Sent:</b> Tuesday, February 17, 2026 8:40 AM<br>
<b>To:</b> pennell@cnf.cornell.edu <pennell@cnf.cornell.edu><br>
<b>Cc:</b> Demis D. John <demis@ucsb.edu>; Robert Nidetz <nidetz@umich.edu>; labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu>; Phillip Bauer <Phillip.Bauer@formfactor.com><br>
<b>Subject:</b> Re: [labnetwork] Photomask sticks to SU8</font>
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<div role="presentation">I have found that the bake times listed in the vendor sheet are "guidelines". </div>
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<div>The reason why baking times are guidelines is that we all bake differently. Some in overs, some on hot plates and some of those are covered. </div>
<div>Temperature (if accurate) and air flow matter. </div>
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<div>As does the moon phase.</div>
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<div>Yours,</div>
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<div dir="ltr">Jasper Nijdam<br>
Technical Manager GNuLab, Georgetown University<span><span><span><span><br>
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