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Hello Jeff,<br>
<br>
We tried in 2024 to order a cylinder of CHF3 and were presented with
the same issue. I reached out to our university Environmental
Health and Safety office and they had no idea how to get an
allowance for UF. The gas vendors were not helpful either. I have
contacts at PlasmaTherm and they were aware of this issue and had no
direct replacement gas options.<br>
<br>
The movement is away from these gases with high Global Warming
Potential (GWP) and towards "friendly" gas mixtures. FAN
(fluorine/argon/nitrogen) gases are an option.<br>
<br>
Here is the link to a 2022 semi.org presentation regarding all
this. Slide 16 has a list of many of our favorite gases. SF6
included.<br>
<a class="moz-txt-link-freetext" href="https://www.semi.org/sites/semi.org/files/2022-11/11%20Robert%20Wieland%20Fraunhofer%20NEW.pdf">https://www.semi.org/sites/semi.org/files/2022-11/11%20Robert%20Wieland%20Fraunhofer%20NEW.pdf</a><br>
<br>
Here is a publication with a few alternatives to CHF3.<br>
<a class="moz-txt-link-freetext" href="https://pmc.ncbi.nlm.nih.gov/articles/PMC10456486/">https://pmc.ncbi.nlm.nih.gov/articles/PMC10456486/</a><br>
<br>
New topic area for UGIM this year? If you discover anything new,
please share.<br>
<br>
Brent
<div class="moz-signature"><br>
<img src="cid:part1.2BAkWt7G.L0bsGubm@ufl.edu" border="0"></div>
<br>
<div class="moz-cite-prefix">On 3/10/2026 11:37 AM, Jeff Salzmann
wrote:<br>
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<blockquote type="cite" cite="mid:DM6PR15MB29884238C1FB5C3D61557CD79046A@DM6PR15MB2988.namprd15.prod.outlook.com">
<div><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#FA4616"><b>[External
Email]</b></span>
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Good morning,</div>
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<br>
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I am looking to purchase some CHF3 for a new RIE system I am
having installed here.</div>
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Airgas has informed me that, "Also, note that R-23 as of
January 1, 2022, CHF3 (R23) has been identified for Phasedown
under the EPA AIM Act
(<a class="moz-txt-link-freetext" href="https://www.epa.gov/climate-hfcs-reduction/phasedown-hydrofluorocarbons-hfcs-issuing-allowance-allocations">https://www.epa.gov/climate-hfcs-reduction/phasedown-hydrofluorocarbons-hfcs-issuing-allowance-allocations</a>
). The customer will either need to provide us with an
allotment from the EPA (in MTeV's) in order to supply, or we
can purchase MTeV's on the open market for a significantly
higher cost.”</div>
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Since that time, I have waited nearly three months for them
not to provide a quote.</div>
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<br>
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According to the EPA’s website on HFC “phase down”:</div>
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<a href="https://www.epa.gov/climate-hfcs-reduction/frequent-questions-phasedown-hydrofluorocarbons#how-allowance-determined" originalsrc="https://www.epa.gov/climate-hfcs-reduction/frequent-questions-phasedown-hydrofluorocarbons#how-allowance-determined" data-outlook-id="60b0d6ce-d794-42d1-867b-f3d1b0e3e338" moz-do-not-send="true">https://www.epa.gov/climate-hfcs-reduction/frequent-questions-phasedown-hydrofluorocarbons#how-allowance-determined</a></div>
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<div style="direction: ltr; font-family: Aptos, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
Application-specific Allowances: Through at least 2030, EPA is
issuing application-specific allowances to entities that use
HFCs in one of four applications:</div>
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<li style="font-family: Aptos, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
<div role="presentation">A propellant in metered dose
inhalers (MDIs)</div>
</li>
<li style="font-family: Aptos, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
<div role="presentation">Structural composite preformed
polyurethane foam for marine use and trailer use</div>
</li>
<li style="font-family: Aptos, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
<div role="presentation">The etching of semiconductor
material or wafers and the cleaning of chemical vapor
deposition chambers within the semiconductor manufacturing
sector</div>
</li>
<li style="font-family: Aptos, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
<div role="presentation">Onboard aerospace fire suppression</div>
</li>
</ol>
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Can anyone offer some guidance to either get the allowance
issued or a vendor that can help with this?</div>
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Thanks!!!</div>
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Jeff</div>
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<div id="ms-outlook-mobile-signature">
<p class="MsoNormal" style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;">
<span style="font-family: Calibri, sans-serif; font-size: 11pt; color: black;">Jeff
Salzmann</span></p>
<p class="MsoNormal" style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;">
<span style="font-family: Calibri, sans-serif; font-size: 11pt; color: black;">Research
Assistant Professor of Electrical Engineering</span></p>
<p class="MsoNormal" style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;">
<span style="font-family: Calibri, sans-serif; font-size: 11pt; color: black;">Cleanroom
Manager, Shared Instrumentation Laboratories</span></p>
<p class="MsoNormal" style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;">
<span style="font-family: Calibri, sans-serif; font-size: 11pt; color: black;">School
of Engineering and Applied Sciences</span></p>
<p class="MsoNormal" style="margin: 0in; font-family: Aptos, sans-serif; font-size: 12pt;">
<span style="font-family: Calibri, sans-serif; font-size: 11pt; color: black;">University
at Buffalo, 114A Davis Hall</span></p>
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<span style="font-family: Calibri, sans-serif; font-size: 11pt; color: black;">105
White Road</span></p>
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<span style="font-family: Calibri, sans-serif; font-size: 11pt; color: black;">Buffalo,
NY 14260-2500</span></p>
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<span style="font-family: Calibri, sans-serif; font-size: 11pt; color: black;">Tel:
716.645.2584</span></p>
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