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Thank you to everyone that helped us out with developing the TDMASn+H2O process in our Beneq TFS200, especially Petr from Beneq service. The attached photo shows our tin oxide at about 110 nm on silicon and silicon/Al2O3 (at the 10 o'clock position) with areas
masked by strips of Kapton tape. The deposition was done at a precursor temperature of 55 to 60C, the substrate was 80-90C. </div>
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Some of the subtleties with this process seems to be: </div>
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<div class="elementToProof" role="presentation">TDMASn decomposes if the temperature is above ~60C for extended periods. </div>
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<div class="elementToProof" role="presentation">TDMASn in a bubbler that has traces of precipitated Sn from a previous run will catalyze decomposition of a new batch. (we have not directly confirmed this though) </div>
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<div class="elementToProof" role="presentation">Even with the bubber at 55 to 57C the vapor pressure is pretty low necessitating one to load the headspace with carrier gas, hold and then inject. </div>
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<div class="elementToProof" role="presentation">A number of folks warned about having the down-stream tubing heated above the precursor temperature. Fortunately Beneq had this covered so it was not an issue.</div>
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So should anyone need devices coated, please let us know. We ARE a service center. </div>
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<img id="image_0" style="max-width: 566px;" size="11060809" data-outlook-trace="F:1|T:1" src="cid:f06b814f-8593-4569-af78-3d7c6c926aca"></div>
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<span style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">Regards,</span></p>
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<span style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);"> Michael Martin, Ph.D.</span></p>
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<span style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">Engineering Senior Researcher </span></p>
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<span style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">Micro/Nano Technology Center</span></p>
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<span style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">University of Louisville<br>
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