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<p>Dear Long,<br>
<br>
have a look at <a class="moz-txt-link-freetext" href="https://holistep.org/">https://holistep.org/</a><br>
Holographic lithographic stepper.<br>
This technology may do it.<br>
<br>
Best regards<br>
Christian</p>
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<div style="margin-bottom: 10px;"> <b>Christian Spoerl</b><br>
Managing Director </div>
<div style="margin-bottom: 10px;"><b>idonus sarl</b><br>
<span style="color:#000000">Rouges-Terres 61<br>
2068 Hauterive / Neuchatel<br>
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style="color: #000000; text-decoration:none;">christian.spoerl@idonus.com</span></a>
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<div class="moz-cite-prefix">On 10.04.2026 17:35, Chang, Long wrote:<br>
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cite="mid:07296202-B8AE-4F13-A2D1-CB3BC971A7A8@cougarnet.uh.edu">
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Hi All,
<div><br>
</div>
<div>I’m exploring approaches to print 360 nm circles with 460 nm
hex pitch for lifting off ~100 nm of Cr/Au. We can do it with
EBL, but we want to scale. Can this be done with a stepper? Does
anyone have experience with the PhableR Talbot lithography
system?</div>
<div><br>
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<div>Thanks,</div>
<div>Long Chang</div>
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Research Professor, ECE<br>
Manager,<span class="Apple-converted-space"> </span>UH
Nanofabrication Facility (UHNF)<br>
University of Houston<br>
713-743-5235<br>
nanofab.uh.edu</div>
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<br>
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