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<div>Hi Kurt,</div>
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<div>I would add a few points here following Garry’s excellent advice:</div>
<div>(1). CNF had the luxury of acquiring the robust Auto Spin Develop systems, which were designed for production. If you don’t have the big budget (>>$100k per system), a cheaper auto spin develop system can add a lot more maintenance work for the tool manager.
This is the common drawback of a cheap auto spin develop systems not mentioned in Garry’s post.</div>
<div>(2). If you have a lot more users working with small chips, the benefit of an auto spin develop system is also not obvious, as users have to use a carrier wafer every time, which can be painful to prepare.</div>
<div>(3) The advantages of an auto spin develop system will only shine when most of your users do the majority of their fabrication on standard size wafers (e.g. 4”, 6” or 8”). Comparing to manual developing procedures, the consistency of the auto spin develop
system is simply amazing.</div>
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For advanced lithography using steppers, it’s also recommended that the cleanroom facility should be equipped with some automated systems, such as the auto spin develop system, auto spin rinse system, auto spin etch system…etc. When throughput, consistency,
uniformity are required for your applications, such automated systems will deliver the magic.</div>
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Best,</div>
<div style="font-family: inherit; font-size: inherit; color: inherit; background-color: transparent;">
Yong Sun</div>
<div></div>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Garry J. Bordonaro <bordonaro@cnf.cornell.edu><br>
<b>Sent:</b> Wednesday, April 15, 2026 11:37 AM<br>
<b>To:</b> 'Kurt Kupcho' <kurt.kupcho@wisc.edu>; labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> Re: [labnetwork] litho spin developer</font>
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<p class="x_MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif">Kurt,</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif"> </span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif">We have been using automated developers for over 20 years. The advantages are *<b>reproducibility</b>*, reduced chemical usage, reduced glassware usage.
</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif"> </span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif">The only disadvantage for us is maintenance, although that is generally quite low. You may have issues with chemical disposal depending on your local rules and the particular
equipment you use. Piece work can be done with some effort and special chucks.</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif"> </span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif">Users like them as they get better and more consistent results, and do not have to deal with pouring chemicals and glassware.</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif"> </span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif">The tools can be expensive. We got ours during the 2000 bubble crash auctions.</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif"> </span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif"> </span></p>
<div>
<p class="x_MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif">Garry J. Bordonaro</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif">Microlithographic Engineer</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif">Cornell NanoScale Facility</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif">250 Duffield Hall</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif">343 Campus Road</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif">Ithaca NY 14853-2700</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif">(607) 254-4936</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif"><a href="mailto:bordonaro@cnf.cornell.edu" target="_blank"><span style="color:blue">bordonaro@cnf.cornell.edu</span></a></span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif"><a href="http://www.cnf.cornell.edu/" data-auth="NotApplicable" target="_blank"><span style="color:blue">http://www.cnf.cornell.edu/</span></a></span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif"> </span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif">Please acknowledge CNF in your publications:</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif">"This work was performed in part at the Cornell NanoScale Science & Technology Facility (CNF), a member of the National Nanotechnology Coordinated Infrastructure (NNCI),
which is supported by the National Science Foundation (Grant NNCI-2025233)."</span></p>
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<p class="x_MsoNormal"><b><span style="font-size:11.0pt; font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt; font-family:"Calibri",sans-serif"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Kurt Kupcho<br>
<b>Sent:</b> Tuesday, April 14, 2026 10:25 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] litho spin developer</span></p>
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<p class="x_MsoNormal"> </p>
<p class="x_MsoNormal"><span style="font-size:11.0pt">Hi all</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt"> </span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt">I was wondering who out there has litho spin developers vs. doing litho development manually with dishes.
</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt"> </span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt">Do you users/students like the spin developer?</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt"> </span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt">Advantages and disadvantages of the spin developer?</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt"> </span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt">Any opinions and guidance would be much appreciated!</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt"> </span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt">Thank you</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt">Kurt</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt"> </span></p>
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<p class="x_MsoNormal"><span style="font-size:11.0pt"> </span></p>
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<p class="x_MsoNormal"><span style="font-size:11.0pt">Kurt Kupcho</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt">Materials Science Engineer</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt">Nanoscale Fabrication Center (NFC)</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt">University of Wisconsin</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt">1550 Engineering Dr.</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt">ECB 3110</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt">Madison, WI 53706</span></p>
<p class="x_MsoNormal"><span lang="ES" style="font-size:11.0pt">E: </span><span style="font-size:11.0pt"><a href="mailto:kurt.kupcho@wisc.edu" target="_blank"><span lang="ES">kurt.kupcho@wisc.edu</span></a></span><span lang="ES" style="font-size:11.0pt"></span></p>
<p class="x_MsoNormal"><span lang="ES" style="font-size:11.0pt">T: 608-262-2982</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt"><img border="0" width="252" height="61" id="x_Picture_x0020_1" style="width: 2.625in; height: auto;" alt="" 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