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<p class="MsoNormal"><span style="font-size:11.0pt;mso-fareast-language:EN-US">Hi Emma,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;mso-fareast-language:EN-US">It looks that you had some fluoropolymer flakes due to the passivation with C4F8 during Bosch process. There are likely seen after long runs of Bosch or pseudo-Bosch
etch or with unoptimized passivation steps. You can see fluoropolymer on the quartz clamp as well. With time, the inner side of the viewport becomes rough as well as it is slowly etched. A standard viewport is made of borosilicate glass if I am not mistaken
and is replaced as part of a preventive maintenance every year. You can opt for a sapphire window that should stay transparent longer, but it is more expensive.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;mso-fareast-language:EN-US">Best,<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-CA" style="font-size:11.0pt;font-family:"Lucida Calligraphy""> </span></b><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal"><b><span lang="EN-CA" style="font-size:11.0pt;font-family:"Lucida Calligraphy"">Lino Eugene, P.Eng., Ph.D.,</span></b><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif">Micro/nanofabrication process engineer<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif">Quantum-Nano Fabrication and Characterization Facility<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif">Office of Research<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif">QNC 1611<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif">University of Waterloo</span><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif">200 University Avenue West</span><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif">Waterloo, ON, Canada </span><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif">N2L 3G1</span><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif"> </span><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif">Ph: +1 519-888-4567 #37788</span><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif">Cell: +1 226-929-1685<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif">Websites:</span><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:black"><a href="https://uwaterloo.ca/quantum-nano-fabrication-and-characterization-facility/"><span style="color:#0563C1">https://uwaterloo.ca/quantum-nano-fabrication-and-characterization-facility/</span></a></span><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:black"><a href="https://fab.qnc.uwaterloo.ca/"><span style="color:#0563C1">https://fab.qnc.uwaterloo.ca/</span></a></span><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif"> </span><span lang="EN-CA" style="font-size:11.0pt;mso-fareast-language:EN-US"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span lang="FR" style="font-size:11.0pt;font-family:"Calibri",sans-serif">De :</span></b><span lang="FR" style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>De la part de</b> Emma Anquillare<br>
<b>Envoyé :</b> 15 avril 2026 21:38<br>
<b>À :</b> Network Fab <labnetwork@mtl.mit.edu><br>
<b>Objet :</b> [labnetwork] What is this??<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Dear LabNetwork,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:black">I humbly call upon your mighty wisdom! A few weeks ago I noticed what (I thought) was some kind of polymer gunk or residue on the interior of our ICP-F porthole window. (See images attached). We have been running
a DRIE/Bosch process every few months, so despite manual cleans before and after each session it didn't seem too remote that polymer residue could build up on the porthole, which is usually not scrubbed.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:black">However, when I went to get rid of it during my monthly manual clean of the tool, it wouldn't go away. I tried rubbing it with IPA on a lab wipe, as well as scratching at it more forcefully with IPA-soaked swabs,
and even scratching with the rear plastic part of the swab. It appeared to go away at first when wet, but once the IPA evaporated, I could see I hadn't actually removed anything. My manual scrubs are also followed by a lengthy hour-and-a-half dry clean (O2-50,
SF6- 10, 10mT, 20 C, RF- 100W, ICP- 2500 W) that users also use for a shorter period after each session. I've been managing this tool for about two years now and never seen anything like this. <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Does anyone know what it is, if it's a concern, and if/how I should remove it?<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Thanks!<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Emma<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="color:black">_____________________________________________</span></b><span style="color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="color:black">Emma Anquillare, PhD</span></b><span style="color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Research Scientist<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">ASRC <span style="background:white">
Nanofabrication Facility</span><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black;background:white">City University of New York</span><span style="color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><img border="0" width="337" height="77" style="width:3.5104in;height:.802in" id="image_0" src="cid:image001.jpg@01DCCDDB.01AC4030"></span><span style="color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><i><span style="color:black">Catalyzing Change, Celebrating Gains: </span></i><span style="color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><i><span style="color:black">A decade of visionary science for the public good.</span></i><span style="color:black"><o:p></o:p></span></p>
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