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Kristofor,</div>
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Many decades ago, when I worked at a Silicon device fab, I learned about some techniques for handling the Hg probe.</div>
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First and foremost, if the Hg comes in contact with Gold, consider it to be contaminated, Hg wets to gold very tenaciously. The engineer in charge would use wipes for Hg cleanup to clean the samples before advancing them further. I realize that this method
may be dated, and I would welcome other subscribers' methods.</div>
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I also learned that the Hg would form an oxide on the surface that could interfere with the measurements but I don't remember the methods used to mitigate this.</div>
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Equipment Dood.</div>
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<b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Kristofor Robert Payer <kpayer@mit.edu><br>
<b>Sent:</b> Tuesday, May 5, 2026 2:10 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] Hg Probe Insights</div>
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Hi All,</div>
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We are installing a new Hg probe at MIT.nano and we have had some inquiries about using it to measure in-process samples (returning to other tools). In our early discussions, it was noted that best practice would be to test film properties on monitor wafers/samples
and then discard them as “Hg-contaminated” afterward. For those who have Hg probe instruments in their facilities:</div>
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<div role="presentation" style="direction: ltr;">How do you handle samples from a contamination standpoint?</div>
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<div role="presentation" style="direction: ltr;">Does anyone have cleaning methodologies that can remove residual Hg contamination? (Without drain disposal)</div>
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<div role="presentation" style="direction: ltr;">Are there any other best practices that should be considered with Hg probe systems?</div>
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We have the ability to perform quantitative testing, but it would be helpful to have a starting point if anyone has experience.</div>
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Thanks in advance,</div>
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Kris</div>
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<p style="margin: 0in;"><span style="font-family: Aptos; font-size: 16px; color: rgb(33, 33, 33);">Kristofor Payer</span></p>
<p style="text-align: left; margin: 0in;"><span style="font-family: Aptos; font-size: 16px; color: rgb(33, 33, 33);">Assistant Director of Operations</span></p>
<p style="text-align: left; margin: 0in;"><span style="font-family: Aptos; font-size: 12pt; color: rgb(33, 33, 33);"><b>MIT.nano</b></span></p>
<p style="text-align: left; margin: 0in;"><span style="font-family: Aptos; font-size: 16px; color: rgb(33, 33, 33);">Massachusetts Institute of Technology</span></p>
<p style="text-align: left; margin: 0in;"><span style="font-family: Aptos; font-size: 16px; color: rgb(33, 33, 33);">60 Vassar Street</span></p>
<p style="text-align: left; margin: 0in;"><span style="font-family: Aptos; font-size: 16px; color: rgb(33, 33, 33);">12-4007</span></p>
<p style="text-align: left; margin: 0in;"><span style="font-family: Aptos; font-size: 16px; color: rgb(33, 33, 33);">Cambridge, MA 02139</span></p>
<p style="text-align: left; margin: 0in;"><span style="font-family: Aptos; font-size: 16px; color: rgb(33, 33, 33);">617-324-1469</span></p>
<p style="text-align: left; margin: 0in;"><span style="font-family: Aptos; font-size: 11pt; color: rgb(0, 120, 215);"><a href="mailto:kpayer@mit.edu" id="OWAc5bbd835-0c80-fb8b-dc37-71f91cc7f302" class="OWAAutoLink" title="mailto:kpayer@mit.edu" data-outlook-id="bd6e75bc-efea-4438-8eb1-df6a7d7e6b0c" style="color: rgb(0, 120, 215); margin-top: 0px; margin-bottom: 0px;">kpayer@mit.edu</a></span></p>
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