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<span style="font-family: Aptos, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0); text-transform: none;">Hi All,</span>
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We are installing a new Hg probe at MIT.nano and we have had some inquiries about using it to measure in-process samples (returning to other tools). In our early discussions, it was noted that best practice would be to test film properties on monitor wafers/samples
and then discard them as “Hg-contaminated” afterward. For those who have Hg probe instruments in their facilities:</div>
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<div role="presentation" style="direction: ltr;"><span style="text-transform: none;">How do you handle samples from a contamination standpoint?</span></div>
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<div role="presentation" style="direction: ltr;"><span style="text-transform: none;">Does anyone have cleaning methodologies that can remove residual Hg contamination? (Without drain disposal)</span></div>
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<div role="presentation" style="direction: ltr;"><span style="text-transform: none;">Are there any other best practices that should be considered with Hg probe systems?</span></div>
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We have the ability to perform quantitative testing, but it would be helpful to have a starting point if anyone has experience.</div>
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Thanks in advance,</div>
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Kris</div>
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<p class="xxmsonormal" style="margin: 0in;"><span style="font-family: Aptos; font-size: 16px; color: rgb(33, 33, 33);">Kristofor Payer</span></p>
<p class="xxmsonormal" style="text-align: left; margin: 0in;"><span style="font-family: Aptos; font-size: 16px; color: rgb(33, 33, 33);">Assistant Director of Operations</span></p>
<p class="xxmsonormal" style="text-align: left; margin: 0in;"><span style="font-family: Aptos; font-size: 12pt; color: rgb(33, 33, 33);"><b>MIT.nano</b></span></p>
<p class="xxmsonormal" style="text-align: left; margin: 0in;"><span style="font-family: Aptos; font-size: 16px; color: rgb(33, 33, 33);">Massachusetts Institute of Technology</span></p>
<p class="xxmsonormal" style="text-align: left; margin: 0in;"><span style="font-family: Aptos; font-size: 16px; color: rgb(33, 33, 33);">60 Vassar Street</span></p>
<p class="xxmsonormal" style="text-align: left; margin: 0in;"><span style="font-family: Aptos; font-size: 16px; color: rgb(33, 33, 33);">12-4007</span></p>
<p class="xxmsonormal" style="text-align: left; margin: 0in;"><span style="font-family: Aptos; font-size: 16px; color: rgb(33, 33, 33);">Cambridge, MA 02139</span></p>
<p class="xxmsonormal" style="text-align: left; margin: 0in;"><span style="font-family: Aptos; font-size: 16px; color: rgb(33, 33, 33);">617-324-1469</span></p>
<p class="xxmsonormal" style="text-align: left; margin: 0in;"><span style="font-family: Aptos; font-size: 11pt; color: rgb(0, 120, 215);"><a href="mailto:kpayer@mit.edu" title="mailto:kpayer@mit.edu" data-outlook-id="bd6e75bc-efea-4438-8eb1-df6a7d7e6b0c" style="color: rgb(0, 120, 215); margin-top: 0px; margin-bottom: 0px;">kpayer@mit.edu</a></span></p>
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